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TECHNISCHE FAKULTÄT DER CHRISTIAN-ALBRECHTS-UNIVERSITÄT ZU KIEL. Not necessary but nice. All comments will appear in this cloud. ECS Hawaii 2008. In-Situ Assessment of Macropore Growth in Low-Doped n-Type Silicon  J. Carstensen, A. Cojocaru, M. Leisner, and H. Föll

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TECHNISCHE FAKULTÄT DERCHRISTIAN-ALBRECHTS-UNIVERSITÄTZU KIEL

Not necessary

but nice

All comments will appear in this cloud

ECS Hawaii 2008


In-Situ Assessment of Macropore Growthin Low-Doped n-Type Silicon

 J. Carstensen, A. Cojocaru, M. Leisner, and H. Föll

University Kiel; Germany

What In-Situ Multi-Mode FFT Impedance Spectroscopy Can Do for You

Good

1. Introduction

2. Persistent Pore Problems

3. Multi-Mode in-situ FFT IS

4. Theory and Results

5. Conclusions


In-Situ Assessment of Macropore Growthin Low-Doped n-Type Silicon

 J. Carstensen, A. Cojocaru, M. Leisner, and H. Föll

University Kiel; Germany

What In-Situ Multi-Mode FFT Impedance Spectroscopy Can Do for You

Not so good!

1. Introduction

2. Persistent Pore Problems

3. Multi-Mode in-situ FFT IS

Note change in title!

4. Theory and Results

5. Conclusions


1. Introduction

“SCR theory”Lehmann Model

1990 Lehmann and Föll:Discovery of “n-macro(aqu, fsi) pores”(while trying to characterize solarSi)

Good

n-macro(fsi. aqu) “Pores”

This picture started it all!


1. Introduction

“SCR theory”Lehmann Model

1990 Lehmann and Föll:Discovery of “n-macro(aqu, fsi) pores”(while trying to characterize solarSi)

Not so good

n-macro(fsi. aqu) “Pores”

This picture started it all!


1. Introduction

Prediction: n-macro(aqu, bsi, litho) pores

1990 Lehmann and Föll:Discovery of “n-macro(aqu, fsi) pores”

“SCR theory”

Note trick with “veiled” text from before and full picture from before

Lehmann modelworks !!!

First SiMacropores


1. Introduction

Only up to a point

1990 Lehmann and Föll:Discovery of “n-macro(aqu, fsi) pores”

“SCR theory”

n-macro(aq, bsi) pores

„Mode Transition“ Talk

„Fast Pore Growth“ Talk

Lehmann modelworks??

Lead up to the high point!

532 µm325 min


1. Introduction

Lehmann Model: Main parameter for pore growth is hole supply

Limitations: Model does not address:

Here going point by point makes sense- Leads up to major point at the end

Chemistry: n-macro(org. electrolytes)n-macro(HAc. Electrolyte)

Crystallography: <100> and <113> Pores “Curro” Pores

Mode Transitions: Crysto - Curro transitionSelf-Organization: Diameter oscillationsCurrent response: Diameter, transitions

Depth(t): Growth mode transitions


1. Introduction

Lehmann Model: Main parameter for pore growth is hole supply

Limitations: Model does not address:

Too much now, because you are spending time on each item. You will now loose your audience. They are all trying to figure out what all the text might mean.

Chemistry: n-macro(org. electrolytes)n-macro(HAc. Electrolyte)

Crystallography: <100> and <113> Pores “Curro” Pores

Mode Transitions: Crysto - Curro transitionSelf-Organization: Diameter oscillationsCurrent response: Diameter, transitions

Depth(t): Growth mode transitions


2. The Problems

Provoke!

Provoke!

Electrodes for Micro Fuel Cells

Lead filaments

Where are the promised products ?

See how annoying these “moving-in” options are?

Note change in color in the title part.

Takes up the color from introduction. Not important, but helps to organize your thoughts.

X-ray filter


5. Conclusion

  • Multi-Mode in-situ FFT IS works

  • Modelling allows to extract a wealth of data relevant for pore growth

  • Scrutinizing and interpreting these data will lead to a better understanding of pore growth in semiconductors

Conclusion

=

The Message!


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