Meeting microcool lhcb
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Meeting Microcool LHCb. Status update 28.03.2012 Tushant Singh. Wafer Status - Fabrication. *EDX = Energy-dispersive X-ray spectroscopy To be done at CSEM Neuchatel on 2 nd April. Sphagetti Problem – Recall. Oxide strip – wet etch (BHF). Wafer#3426.

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Meeting Microcool LHCb

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Meeting microcool lhcb

Meeting MicrocoolLHCb

Status update 28.03.2012

Tushant Singh


Wafer status fabrication

Wafer Status - Fabrication

*EDX = Energy-dispersive X-ray spectroscopy

To bedoneat CSEM Neuchatel on 2nd April


Sphagetti problem recall

SphagettiProblem – Recall

Oxide strip – wet etch (BHF)

Wafer#3426

White colored ‘Sphagetti’

observed coming out of

the channels


Sem pictures

SEM pictures

SEM pictures of structures weretaken and thisiswhat the side-walls of the channel look like.


Sphagetti problem

Sphagetti Problem

Wafer with Sphagetti Problem #3694

Wafer without Sphagetti problem #3442

You canseedirtysidewalls and dirty surface in thispicture


Sphagetti problem1

SphagettiProblem

  • Possible causes –

    • WE DONT UNDERSTAND, but the guessis:

      • Contamination in dry etch machine

      • Contamination in wetetch bath

        For nowwe are not observinganysuchproblems


Surface roughness problem

Surface RoughnessProblem

  • During SEM imagingfor lookingatSphagettiproblemitwasobservedthat the Wafer surface wasvery rough.

    • This could cause badbonding.


Compare surface roughness top surface

Compare surface roughness (Top surface)

Wafer with Sphagetti problem #3694

Wafer without Sphagetti problem #3442


Surface roughness problem1

Surface RoughnessProblem

  • Preliminary investigations show thatthisproblemisassociatedwith wafers thathad the Sphagettiproblem.

  • The wafer whichdid not have sphagettiproblemlooked OK in terms of Surface roughness.

  • Further investigation neededwith more wafers.


Further activities

Furtheractivities

  • New batch of 3 wafers

  • Modifiedprocess flow

    • Slight modification in process flow has been proposed and isunder discussion with Alessandro.


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