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N&K Analyzer SOP

N&K Analyzer SOP. Writer ： Szu-Ching Liu. Pr eparation. Make sure that the power is already on. Preparation. Put testing wafer up side down on all three ruby balls well, and must keep the wafer equilibrium. Preparation. Put the testing wafer well like this. Preparation.

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N&K Analyzer SOP

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  1. N&K Analyzer SOP • Writer：Szu-Ching Liu

  2. Preparation Make sure that the power is already on

  3. Preparation Put testing wafer up side down on all three ruby balls well, and must keep the wafer equilibrium.

  4. Preparation Put the testing wafer well like this.

  5. Preparation Users need to choose the“exec-ute”icon to executing baseline. To make sure the N&K analyzer is working properly, users must remember to calibrate it with baselineing the Si reference before measuring testing wafer.

  6. Baseline checking Make sure the three values above are all under 0.15%.

  7. Putting Testing Sample

  8. Executing Sample Scan

  9. After sample scanning, we can get the experimentally refractive figure.

  10. Choose the way to analysis Users can choose either “Default Film Structure” or ”R&D”( Edit film structure yourself).

  11. Default Film Structure Choosing the recipe you need from database which is defaulted.

  12. Choosing “R&D” Function (EX:Poly2000A/SiO21000A/Si) Adjust interface roughness Define the film structure Enter the number of layers. Press “OK” to save the parameters you set. Choose the fitting control way you need.

  13. Executing Data Analysis

  14. Result The spec. of goodness of fit is under 0.01

  15. Check Data Summary

  16. The way to quit Enter “Quit N&K ”and do power off the PC.

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