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Sputter coating made easy. Sputter head arm. IMPORTANT! If this is the first time you are going to use the sputter coater , then talk to Nader. Do NOT proceed. Check the height of the plate, where the sample is placed [1]. It should be 35 or 50 mm, there is a plastic scale bar [2]

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Sputter coating made easy

Sputter head arm

  • IMPORTANT! If this is the first time you are going to use the sputter coater, then talk to Nader. Do NOT proceed.

  • Check the height of the plate, where the sample is placed [1]. It should be 35 or 50 mm, there is a plastic scale bar [2]

  • Place samples and close lid.

  • Depend on you choose 35 mm or 50 mm WD, one can read in book [3] how many ampere ,for how long time is necessary to reach the desired coating thickness (15-20 nm is a good choice) from the corresponding curve. Add 10-15 seconds to the necessary coating time, allowing you to adjust the current.

  • Set timer [4]

  • Check that the vacuum is connected [5]. Turn big yellow button on the backside of the instrument to open.

  • The valves position must be set as lower picture “ ON”[ 5].

  • Turn machine on.[6]

  • Turn on vacuum pump on wall, on contact marked “S” [7]

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3

1

2

5

8

14

4

OFF

6

13

15

Do not touch

  • Wait for the pressure to reach 5*10-2 mbar [8]

  • Open the main valve[9] on argon bottle, open fully valve [11] counterclockwise.

  • Adjust the outlet pressure approximately 1.0 barthe big black knob clockwise[12].

  • Do NOT touch the knob labeled “Argon“ on the instrument.

  • Flush machine 3- 5 times(press button labeled “flush” [13]), the pressure should go back to 5*10-2mbar after each press

  • Press start [14] and adjust the current to the desired value [15].

  • Wait until the timers counts down and show 0.

  • Turn off machine

  • Turn off the pump (on wall contact)

  • Close the main valve[9] on argon bottle, close fully valve [11] clockwise.

  • Close the big black knob counterclockwise[12].

  • Turn the big yellow button on the backside of the instrument

  • REMEMBER YOUR SAMPLES

  • Close the sputter head arm.

ON

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9

11

12

By Nader Payami, Christian Schack Pedersen and Sorin Nedel, January 2012


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