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Processing and Layout

Processing and Layout. Identify all Parasitic Capacitors . The Anatomy of an Inverter. Well Definition. Well implant. FIELD IMPLANTS. GATE OXIODE and VT ADJUST. ADD POLYGATE. Junction masking and implant. Contacts, m1, m2 & overglass. The Anatomy of an Inverter.

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Processing and Layout

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  1. Processing and Layout

  2. Identify all Parasitic Capacitors

  3. The Anatomy of an Inverter

  4. Well Definition

  5. Well implant

  6. FIELD IMPLANTS

  7. GATE OXIODE and VT ADJUST

  8. ADD POLYGATE

  9. Junction masking and implant

  10. Contacts, m1, m2 & overglass

  11. The Anatomy of an Inverter

  12. DESIGN RULES • Mask # Mask Layer Function • 1 nwell Tub for PMOS Transistor • 2 active Define Transistor D-S-ch. • 3 poly Define Transistor W & L • 4 select Threshold adjust • 5 poly contact Physical to gate by m1 • 6 active contact Physical to S & D by m1 • 7 metal 1 global interconnect • 8 via physical connect of m1 & m2 • 9 pad opening for bond wire • 10 poly2 Caps and interconnect

  13. DESIGN RULES

  14. MASK ALIGNMENT & LAYOUT

  15. Large or ANALOG TRANSISTORS

  16. Comm Centroid Layout

  17. Capacitor Matching

  18. Layout and Noise Containment

  19. Layout and Noise Containment

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