EE235 Lithography Presentation. Observation of High-Aspect-Ratio Nanostructures Using Capillary Lithography , by K. Y. Suh, S.-J. Choi, S. J. Baek, T. W. Kim, and R. Langer, Adv. Mater. 2005, 17, No. 5, March 8. Agenda. Periodic nanostructure Capillary lithography Results
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EE235 Lithography Presentation
Observation of High-Aspect-Ratio Nanostructures Using Capillary Lithography
,by K. Y. Suh, S.-J. Choi, S. J. Baek, T. W. Kim, and R. Langer, Adv. Mater. 2005, 17, No. 5, March 8
Photonic crystals, from S. M. Yang, G. A. Ozin, Chem. Commun. 2000, 2507
Nanometer-scale biological sensor, from K.-B. Lee, S.-J. Park, C.-A. Mirkin, J. C. Smith, and M. Mrksich, Science 2002, 295, 1702.
Data storage, from Y.-W. Chen, Y.-H. Tang, L.-Z Pei, and C. Guo,Adv. Mater 2005, 17, No. 5, March 8
Place the mold on the polymer surface
Cooling and mold remove
Remove the model
A schematic illustration for the formation of the two kinds of nanostructure, depending on wetting condition
SEM images of well-defined, high-aspect-ratio nanopillars using a) SPS and b) PEG copolymer. The diameters at the base are 90 nm and 110 nm, respectively.