NSLS II Metrology R&D Activities. Peter Z. Takacs Experimental Facilities Advisory Committee Review 20 Oct 2006. Rationale for Metrology R&D for NSLS II. Every new advance in SR source design has driven improvements in optical components:
Peter Z. Takacs
Experimental Facilities Advisory Committee Review
20 Oct 2006
Gratings, spheres, cylinders, paraboloids, ellipsoids, etc.
Add “real world” slope error to soft x-ray beamline KB mirror surface:
BNL LTP III measuring Si cylinder
QED SSI uses conventional Zygo Fizeau interferometer head combined with 6-axis positioning manipulator.
Measured and predicted 40nm image shape from SSI on 100mm long elliptical cylinder.
Yumoto,et al., RSI 76, 063708 (2005)
QED-developed algorithm solves for test surface error AND reference optics errors => self-calibrating, < 2nm residual errors.
View from interferometer
in stitching of Osaka elliptical cylinder
Elastic Emission Machining
Y. Mori, Osaka
High speed rotating tool