Mact development
This presentation is the property of its rightful owner.
Sponsored Links
1 / 14

MACT DEVELOPMENT PowerPoint PPT Presentation


  • 83 Views
  • Uploaded on
  • Presentation posted in: General

MACT DEVELOPMENT. DEFINITIONS HAP - HAZARDOUS AIR POLLUTANTS: FEDERAL LIST OF 188 COMPOUNDS AND COMPOUND CATAGORIES. COMMON SEMICONDUCTOR INORGANIC HAPs - ARSINE (PART OF ARSENIC COMPOUNDS), PHOSPHINE, HCl, HF AND CHLORINE. INORGANIC HAPs “NOT” - FLUORINE, SILICON

Download Presentation

MACT DEVELOPMENT

An Image/Link below is provided (as is) to download presentation

Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.


- - - - - - - - - - - - - - - - - - - - - - - - - - E N D - - - - - - - - - - - - - - - - - - - - - - - - - -

Presentation Transcript


Mact development

MACT DEVELOPMENT

DEFINITIONS

HAP - HAZARDOUS AIR POLLUTANTS: FEDERAL LIST OF

188 COMPOUNDS AND COMPOUND CATAGORIES.

COMMON SEMICONDUCTOR INORGANIC HAPs - ARSINE

(PART OF ARSENIC COMPOUNDS), PHOSPHINE, HCl, HF

AND CHLORINE.

INORGANIC HAPs “NOT” - FLUORINE, SILICON

TETRAFLUORIDE, SILANE, AMMONIA, BORON

TRIFLUORIDE AND HYDROGEN.


Mact development1

MACT DEVELOPMENT

DEFINITIONS (CONTINUED)

COMMON SEMICONDUCTOR ORGANIC HAPs -

METHANOL, XYLENES, ETHYL BENZENE, ETHYLENE

GLYCOL, MEK, MIBK AND GLYCOL ETHER COMPOUNDS.

ORGANIC HAPs “NOT” - PGMEA (DOES NOT MEET

GLYCOL ETHER COMPOUNDS DEFINITION), IPA,

PFC’S AND ACETONE.


Mact development2

MACT DEVELOPMENT

DEFINITIONS (CONTINUED)

MACT - MAXIMUM ACHIEVABLE CONTROL TECHNOLOGY,

WHICH IS TOP PERFORMING CONTROL TECHNOLOGY

FOR HAZARDOUS AIR POLLUTANTS (HAP).

PTE - POTENTIAL TO EMIT (MAXIMUM CAPACITY).

MAJOR HAPs SOURCE - SEMICONDUCTOR SITE WITH

PTE OF 10 TONS/YEAR OR MORE OF ONE HAP OR PTE

OF 25 TONS/YEAR OR MORE OF COMBINED HAPS.


Mact development3

MACT DEVELOPMENT

DEFINITIONS (CONTINUED)

SYNTHETIC MINOR HAPs SOURCE - A NON-MAJOR

SEMICONDUCTOR SITE WITH PTE OF 10 TONS/YEAR OR

MORE OF ONE HAP OR PTE OF 25 TONS/YEAR OR MORE

OF COMBINED HAPS WITH NO CONTROL (I.E. IF CONTROL

IS REMOVED).

MINOR OR NATURAL MINOR HAPs SOURCE - A NON-

MAJOR SEMICONDUCTOR SITE WITH PTE OF LESS

THAN 10 TONS/YEAR OF ONE HAP OR PTE OF LESS

THAN 25 TONS/YEAR OF COMBINED HAPS WITH NO

CONTROL.


Mact development4

MACT DEVELOPMENT

BRIEF HISTORY

SEMICONDUCTOR MACT ORIGINALLY SCHEDULED

FOR NOVEMBER, 1997. DELAYED UNTIL

NOVEMBER, 2000. STILL NOT OUT.

SIA/EPA IN NEGOTIATIONS SINCE EARLY 1990’S.

CURRENT CHAIR IS TIM HIGGS, INTEL.

ONLY A COUPLE OF MAJOR HAP SOURCES IN

UNITED STATES TODAY.


Mact development5

MACT DEVELOPMENT

BRIEF HISTORY

EARLY PROPOSED MACT BY EPA WAS  99%

CONTROL FOR INORGANICS AND ORGANICS.

THIS FORCED USE OF THERMAL OXIDIZERS FOR

VOC CONTROL, WHICH CREATED MORE CO & NOx

AND USED MORE ENERGY THAN OTHER TYPES.

VERY DIFFICULT TO MEET DUE TO LOW INLET

CONCENTRATIONS OF HCl, HF AND CHLORINE

INTO WET SCRUBBERS, AND OUTLET

MEASUREMENT ISSUES.


Mact development6

MACT DEVELOPMENT

BRIEF HISTORY

SIA ABLE TO TECHNICALLY CONVINCE EPA

OF:

1. INLET CONCENTRATIONS VERY LOW AND

IMPACTS CONTROL EFFICIENCY FOR BOTH

WET SCRUBBERS AND VOC CONTROL.

2. MACT SHOULD INCLUDE OUTLET

CONCENTRATION AS WELL AS CONTROL

EFFICIENCY (I.E. 95% OR OUTLET

CONCENTRATION OF 1 PPMv).


Mact development7

MACT DEVELOPMENT

BRIEF HISTORY

SIA ABLE TO TECHNICALLY CONVINCE EPA

OF:

3. CONTINUOUS MONITORING IS DIFFICULT

TO DO AT LOW OUTLET CONCENTRATIONS.

4. ORGANIC HAPs SHOULD BE MEASURED

AS TOTAL VOCs.

5. INORGANIC HAPs - USE HCl AS SURROGATE.


Mact development8

MACT DEVELOPMENT

BRIEF HISTORY

ONLY A FEW MAJOR SEMICONDUCTOR HAP

SOURCES, SO SUBMITTED DELIST PETITION IN

2000 TO REMOVE SEMICONDUCTOR INDUSTRY

FROM ANY MACT REGULATIONS.

EPA STANCE - NO MAJOR HAP SOURCES BEFORE

CONSIDERING DELIST PETITION.

ONE MAJOR SOURCE CANNOT BECOME MINOR

SOURCE (CO-LOCATED FACILITY WITH 1000’s

OF TONS/YEAR HAP EMISSIONS).


Mact development9

MACT DEVELOPMENT

TODAY’S STATUS

DELIST PETITION ON HOLD BY EPA. NOT LOOKING GOOD.

DRAFT MACT REGULATIONS BY EPA IN FOURTH

QUARTER, 2001.

MACT HAMMER FALLS MAY, 2002. FINAL MACT

REGULATION SHOULD BE HERE BEFORE THEN.

FIRST ENVIRONMENTAL LAW SUIT AGAINST EPA,

INCLUDES SEMICONDUCTOR MACT.


Mact development10

MACT DEVELOPMENT

WHAT IS MACT LOOKING LIKE TODAY?

INORGANIC HAPs - WET SCRUBBERS, WITH LESS

THAN 20 PPMv OUTLET CONCENTRATION AS HCl.

ORGANIC HAPs - VOC CONTROLS, WITH LESS

THAN 20 PPMv OUTLET CONCENTRATION AS TOTAL

VOCs.

CHEMICAL STORAGE TANKS (E.G. HYDROCHLORIC

ACID FOR RO/DI) - 99% CONTROL OR 1 PPMv

OUTLET. SIA SUBMITTING FURTHER DATA TO

MODIFY THESE REQUIREMENTS.


Mact development11

MACT DEVELOPMENT

WHAT IS MACT LOOKING LIKE TODAY?

NO REQUIREMENTS FOR WASTEWATER

TREATMENT, BOILERS, DIESEL GENERATORS,

AND WASTE STORAGE TANKS.


Mact development12

MACT DEVELOPMENT

ITEMS TO DETERMINE

EPA NEEDS TO DETERMINE IF MACT REGULATIONS

APPLY TO AREA SOURCES (SYNTHETIC AND

NATURAL MINOR SOURCES).

MONITORING AND RECORD KEEPING

REQUIREMENTS.


Mact development13

MACT DEVELOPMENT

ISSUES

HOW WILL MACT BE IMPLEMENTED BY LOCAL

AIR REGULATORY AUTHORITIES?

WHAT IMPACT WILL THERE BE FROM LAW SUIT?

CAN MACT BE ISSUED BEFORE MAY, 2002?

WHAT WILL HAPPEN WITH DELIST PETITION?


  • Login