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ITRS Conference 2002 July 24, 2002 San Francisco, California. ITRS 2002 Environmental, Safety and Health Update. Shinya Hashimoto - NEC Jim Jewett - Intel. KEY CHANGES FOR 2002. Most Table requirements for 2002 remain unchanged from 2001 ITRS Climate Change requirements tightened

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Itrs conference 2002 july 24 2002 san francisco california

ITRS Conference 2002July 24, 2002 San Francisco, California

ITRS 2002 Environmental, Safety and Health Update

Shinya Hashimoto - NEC

Jim Jewett - Intel


Key changes for 2002
KEY CHANGES FOR 2002

  • Most Table requirements for 2002 remain unchanged from 2001 ITRS

  • Climate Change requirements tightened

    • More aggressive challenge to meet PFC emissions reduction goal

    • New or tighter targets for CVD and Etch Process

  • PFOS-based materials restrictions identified and non-PFOS EUV resist development added

  • ESH Impact assessments modified to eliminate “acceptable risk”




Table 84a Chemicals, Materials and Equipment Management Technology Requirements—Near-term


Table 83a ESH Intrinsic Requirements—Near-term Technology Requirements—Near-term


Revisions for 2003
REVISIONS for 2003 Technology Requirements—Near-term

  • Introduce reference table for materials having potential for restricted use

  • Revise resource conservation categorizaton for water

  • Develop numeric requirements and/or methodologies for determining “optimize, minimize, reduce, efficiency” requirements

  • Revisit concept of ESH assessment to look at broader scope

  • Update “technology mapping” with key thrusts for alignment of ESH requirements


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