New Route to Fabricating PDMS-based Microfluidic Components

1. New Route to Fabricating PDMS-based Microfluidic Components David A. Weitz, Harvard University, DMR 0820484 The use of PMGI photoresist enables high spatial resolutionlithography to be performed on PDMS without any surface modification extending the range of PDMS processing for MEMS and micro-fluidic structures. The adhesion between the PGMI and PDMS also facilitates multilayer structures to be fabricated and enables the use of traditional semiconductor processing cleanroom equipment as an alternative to soft lithography. These devices are being designed for energy applications, to convert mechanical into electrical energy, and electrical into mechanical energy. Example of a test pattern of 20 μm squares in spun-coated PDMS produced using the new PMGI-based lithography method