HiTeck-2009
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HiTeck-2009 СЕНСОРЫ НА ПОВЕРХНОСТНО-АКУСТИЧЕСКИХ ВОЛНАХ ДЛЯ МОНИТОРИНГА АТМОСФЕРНОГО ВОЗДУХА, В ТОМ ЧИСЛЕ, НА НАЛИЧИЕ ВЗРЫВООПАСНЫХ МЕТАНА И ПРОПАНА. Соборовер Э.И., к.х.н., с.н.с., НИИХимии ГОУ ВПО «Нижегородский государственный Университет им.Н.И.Лобачевского», ООО «Сенсор НН», ООО «Эйс»

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INTERMATIC -2004, 2005, 2006, 2007. 5


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SAW Sensor

RF link

Interrogator / Gateway

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- Mastercool 55100 () 3.5 /.

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, - : F () = (/3) + B

/(/3)


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- -106 -

NH3-


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SAW/FT-IR parameters measurement setup

Hierlemann A., Ricco A.J., Bodenhofer K., Gopel W. // Anal. Chem. 1999. V. 71. N 15. P. 3022.


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Micrograph of the single-chip CMOS gas sensor microsystem. The three different transducers (capacitive, mass-sensitive, andcalorimetric) and the additional temperature sensor are marked. The driving and signal-conditioning circuitry of the different sensors and the digital interface are integrated on-chip. The total size of the chip is 7 7 mm2.

Anal. Chem., 78 (19), 6910 -6920, 2006. Detection and Discrimination Capabilities of a Multitransducer Single-Chip Gas Sensor System //Petra Kurzawski, Christoph Hagleitner, and Andreas Hierlemann


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h , ; VR2 - , (/)2; , .

, , , , :

(physical sorption = Ph.S.)

(polymerrelaxation = PR), :

G0297 PhS+PR = - (3.68 0.94) /,

H0PhS+PR = (58.2 17.1) /,

S0297 PhS+PR = (208 65) /.


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Energy diagram of the ammonia sorption process


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F =

+ K

and

- Lame constants, which are represented in elastic module () and Poisson coefficient (s).

Equation that shows the dependencies between SAW frequency and any variations in the SAW propagation area:

Where delta m, , h, s, e change of mass, elastic coefficient, viscosity, conductivity, dielectric constant, capacity, temperature, constant.

The equation which includes elastic constant is:

+

whereh sensing layer thikness, m; VR2-square Rayleigh speed in the quartz crystal, (m/c)2;

.

The SAW frequency decreasing, which is observed in most cases, caused by the gas adsorption in the polymer and can be calculated using the formula:

where substrate constant for the AT-cut quartz is

Snow A., Wohltjen H. // Anal. Chem. 1984. V. 56. 8. P. 1411.


Tracking changes at the surface rapid characterization of bio interfaces q sense e4

TRACKING CHANGES AT THE SURFACE:rapid characterization of bio-interfacesQ-Sense E4


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