Scanning electron microscope sem
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Scanning electron microscope(SEM)- 掃描式電子顯微鏡 PowerPoint PPT Presentation


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Scanning electron microscope(SEM)- 掃描式電子顯微鏡. Adviser : KUN-SIAN WU Reporter: CHIN-TUNG CHU. 2013/12/24. O utline. Introduction Principle & Structure Application Comparison Conclusion References. Introduction. Introduction. 圖片來源 : 南台科技大學 FE-SEM 實驗室. Introduction. Max Knoll.

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Scanning electron microscope(SEM)- 掃描式電子顯微鏡

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Scanning electron microscope sem

Scanning electron microscope(SEM)-掃描式電子顯微鏡

Adviser : KUN-SIAN WU

Reporter: CHIN-TUNG CHU

2013/12/24


O utline

Outline

  • Introduction

  • Principle & Structure

  • Application

  • Comparison

  • Conclusion

  • References


Scanning electron microscope sem

Introduction


Introduction

Introduction

圖片來源: 南台科技大學 FE-SEM實驗室


Introduction1

Introduction

Max Knoll

Sir Joseph Thomson

Ernst Ruska

Manfred von Ardenne

(Zworykin)


Scanning electron microscope sem

Structure


Structure

Structure

  • Vacuum system(真空系統)

  • Mechanical pump(機械泵)、Oil diffusion pump(油擴散泵)、Turbo molecular pumps(渦輪分子泵).

  • Electron beam system(電子束系統)

  • Electron beam gun(電子槍)-Field emission(場發射)、Wolfram(鎢)、Lanthanum exaboride(六硼化鑭).

  • Electromagnetic lens(電磁透鏡)

  • Imaging system(成像系統)

  • Secondary electron(次級電子)、Back-scattered electron wireless(背散無線電子)、Auger electron(歐傑電子)、X-ray


Structure1

Structure

圖片來源: 南台科技大學 FE-SEM及奈米材料及電子實驗室


Scanning electron microscope sem

Principle


Principle

Principle

Electron beam gun

Bunching mirror system

Sample

X-ray and electorn

Imaging in CRT/LCD

Electron beam gun

(high voltage)

The first Bunching

mirror

The Second Bunching

mirror

Objective

X-ray detectors

Sample room

Vacuum pump system

(diffusion or Turbo molecular)

Electronic control and imaging system :

Reflection electron、Secondary electron、Sample current Amplifier

Selector Switch、Video enlarge、CRT、camera

Zoom controller、Scan generator


Application

Application


Application1

Application

圖片來源: 南台科技大學 奈米材料及電子實驗室


Comparison

Comparison


Comparison1

Comparison

  • SEM: reflected by the incident electron.

  • 電子束經樣品反射

  • AFM: Van Der Waals Force

  • 原子間的凡得瓦力

  • Measurement needs in vacuum.

  • 需要在真空中量測

  • Samples must be conductive.

  • 樣品須為導電材質

  • Need gold, platinum if the material is not conductive.

  • 若材料不導電,需鍍上金或白金

  • Samples can not be a powder or a volatile items.

  • 樣品不能是粉末或揮發性物品

圖片來源: 南台科技大學 奈米材料及電子實驗室


Conclusion

Conclusion

  • 掃描式電子顯微鏡(SEM)雖然有真空下測量、樣品需導電及樣品不能為粉末等缺點,但其電子槍壽命可使用許久,相較於原子力顯微鏡(AFM)的探針,確實是有優勢,而且樣品準備上也很簡單,在科學研究上還是有一定的地位存在。


References

References

  • 維基百科,SEM、AFM

  • 南台科技大學,碩士論文,莊凱揚

  • 南台科技大學,碩士論文,許宏全

  • 南台科技大學,FE-SEM實驗室,奈米材料及電子研究室

  • SEM可使用地點: 南台科技大學、成功大學、國家奈米實驗室、中山大學


Scanning electron microscope sem

Thanks for your attention !


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