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Scanning electron microscope(SEM)- 掃描式電子顯微鏡

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Scanning electron microscope(SEM)- 掃描式電子顯微鏡. Adviser : KUN-SIAN WU Reporter: CHIN-TUNG CHU. 2013/12/24. O utline. Introduction Principle & Structure Application Comparison Conclusion References. Introduction. Introduction. 圖片來源 : 南台科技大學 FE-SEM 實驗室. Introduction. Max Knoll.

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scanning electron microscope sem

Scanning electron microscope(SEM)-掃描式電子顯微鏡

Adviser : KUN-SIAN WU

Reporter: CHIN-TUNG CHU

2013/12/24

o utline
Outline
  • Introduction
  • Principle & Structure
  • Application
  • Comparison
  • Conclusion
  • References
introduction
Introduction

圖片來源: 南台科技大學 FE-SEM實驗室

introduction1
Introduction

Max Knoll

Sir Joseph Thomson

Ernst Ruska

Manfred von Ardenne

(Zworykin)

structure
Structure
  • Vacuum system(真空系統)
  • Mechanical pump(機械泵)、Oil diffusion pump(油擴散泵)、Turbo molecular pumps(渦輪分子泵).
  • Electron beam system(電子束系統)
  • Electron beam gun(電子槍)-Field emission(場發射)、Wolfram(鎢)、Lanthanum exaboride(六硼化鑭).
  • Electromagnetic lens(電磁透鏡)
  • Imaging system(成像系統)
  • Secondary electron(次級電子)、Back-scattered electron wireless(背散無線電子)、Auger electron(歐傑電子)、X-ray
structure1
Structure

圖片來源: 南台科技大學 FE-SEM及奈米材料及電子實驗室

principle
Principle

Electron beam gun

Bunching mirror system

Sample

X-ray and electorn

Imaging in CRT/LCD

Electron beam gun

(high voltage)

The first Bunching

mirror

The Second Bunching

mirror

Objective

X-ray detectors

Sample room

Vacuum pump system

(diffusion or Turbo molecular)

Electronic control and imaging system :

Reflection electron、Secondary electron、Sample current Amplifier

Selector Switch、Video enlarge、CRT、camera

Zoom controller、Scan generator

application1
Application

圖片來源: 南台科技大學 奈米材料及電子實驗室

comparison1
Comparison
  • SEM: reflected by the incident electron.
  • 電子束經樣品反射
  • AFM: Van Der Waals Force
  • 原子間的凡得瓦力
  • Measurement needs in vacuum.
  • 需要在真空中量測
  • Samples must be conductive.
  • 樣品須為導電材質
  • Need gold, platinum if the material is not conductive.
  • 若材料不導電,需鍍上金或白金
  • Samples can not be a powder or a volatile items.
  • 樣品不能是粉末或揮發性物品

圖片來源: 南台科技大學 奈米材料及電子實驗室

conclusion
Conclusion
  • 掃描式電子顯微鏡(SEM)雖然有真空下測量、樣品需導電及樣品不能為粉末等缺點,但其電子槍壽命可使用許久,相較於原子力顯微鏡(AFM)的探針,確實是有優勢,而且樣品準備上也很簡單,在科學研究上還是有一定的地位存在。
references
References
  • 維基百科,SEM、AFM
  • 南台科技大學,碩士論文,莊凱揚
  • 南台科技大學,碩士論文,許宏全
  • 南台科技大學,FE-SEM實驗室,奈米材料及電子研究室
  • SEM可使用地點: 南台科技大學、成功大學、國家奈米實驗室、中山大學
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