Weekly group meeting report
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Weekly Group Meeting Report. Renjie Chen Supervisor: Prof. Shadi A. Dayeh. Summary. For neural probe samples:

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Weekly Group Meeting Report

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Weekly group meeting report

Weekly Group Meeting Report

Renjie Chen

Supervisor: Prof. Shadi A. Dayeh


Summary

Summary

  • For neural probe samples:

    -- A new batch of 6 samples, with metal stacking (Ti/Ni/Ti/Ni=30/200/30/50), have been fabricated. These samples were bonded with 70um Si pieces, and were sent back to school for Si thinning.

    -- The previous batch of samples were processed with Ni dots writing. Even though the sample surface wasn’t clean enough last time, but the Ni dots look ok through microscope.

  • For InGaAs samples:

    -- The layout of the Ni-InGaAs diffusion fin channels was re-designed, and the EBL writing sequence .

    -- Three set of new samples were under fabrication, and the 2nd EBL writing for fin structures has been finished.


Weekly group meeting report

Annealing modification

Previous test with Si holder:

Planned test with SiC holder:


Process of ni ingaas diffusion study

ProcessofNi-InGaAsDiffusion Study

Process

1st EBL - Markers

2nd EBL – Fin

3rd EBL – Ni Source

  • Only InGaAs <110> & <100> orientations are present in the new design

  • More fin widths are included in one set of fins

  • The EBL writing sequence was also changed


Weekly group meeting report

68

32

147

89

81

475nm

286

186

95

61

52

45


Three samples in process

Three Samples in Process

Sample 1

-- 8 units, the fin writing was not so good

-- will be used for annealing time test

Sample 2

-- 8 units, the fin writing was good

-- will be used for 250’C annealing study

Sample 3

-- 12 units, the fin writing is under process

-- will be used for 300’C annealing study


Weekly group meeting report

Plan

  • Prepare another two set of InGaAs samples

    -- two InGaAs samples with 8 units, in case of problems during the process

    -- There two set of samples can be used for 275’C test, and 325’C if both work

  • Carry out the annealing to existing two set of samples

    -- 250’C and 300’C diffusion study

    -- SEM, AFM characterization


Thank you q a

Thank youQ&A


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