weekly group meeting report
Download
Skip this Video
Download Presentation
Weekly Group Meeting Report

Loading in 2 Seconds...

play fullscreen
1 / 9

Weekly Group Meeting Report - PowerPoint PPT Presentation


  • 114 Views
  • Uploaded on

Weekly Group Meeting Report. Renjie Chen Supervisor: Prof. Shadi A. Dayeh. Summary. For neural probe samples:

loader
I am the owner, or an agent authorized to act on behalf of the owner, of the copyrighted work described.
capcha
Download Presentation

PowerPoint Slideshow about ' Weekly Group Meeting Report' - kiefer


An Image/Link below is provided (as is) to download presentation

Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.


- - - - - - - - - - - - - - - - - - - - - - - - - - E N D - - - - - - - - - - - - - - - - - - - - - - - - - -
Presentation Transcript
weekly group meeting report

Weekly Group Meeting Report

Renjie Chen

Supervisor: Prof. Shadi A. Dayeh

summary
Summary
  • For neural probe samples:

-- A new batch of 6 samples, with metal stacking (Ti/Ni/Ti/Ni=30/200/30/50), have been fabricated. These samples were bonded with 70um Si pieces, and were sent back to school for Si thinning.

-- The previous batch of samples were processed with Ni dots writing. Even though the sample surface wasn’t clean enough last time, but the Ni dots look ok through microscope.

  • For InGaAs samples:

-- The layout of the Ni-InGaAs diffusion fin channels was re-designed, and the EBL writing sequence .

-- Three set of new samples were under fabrication, and the 2nd EBL writing for fin structures has been finished.

slide3

Annealing modification

Previous test with Si holder:

Planned test with SiC holder:

process of ni ingaas diffusion study
ProcessofNi-InGaAsDiffusion Study

Process

1st EBL - Markers

2nd EBL – Fin

3rd EBL – Ni Source

  • Only InGaAs <110> & <100> orientations are present in the new design
  • More fin widths are included in one set of fins
  • The EBL writing sequence was also changed
slide5

68

32

147

89

81

475nm

286

186

95

61

52

45

three samples in process
Three Samples in Process

Sample 1

-- 8 units, the fin writing was not so good

-- will be used for annealing time test

Sample 2

-- 8 units, the fin writing was good

-- will be used for 250’C annealing study

Sample 3

-- 12 units, the fin writing is under process

-- will be used for 300’C annealing study

slide8
Plan
  • Prepare another two set of InGaAs samples

-- two InGaAs samples with 8 units, in case of problems during the process

-- There two set of samples can be used for 275’C test, and 325’C if both work

  • Carry out the annealing to existing two set of samples

-- 250’C and 300’C diffusion study

-- SEM, AFM characterization

ad