Weekly Group Meeting Report. Renjie Chen Supervisor: Prof. Shadi A. Dayeh. Summary. For neural probe samples:
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Supervisor: Prof. Shadi A. Dayeh
-- A new batch of 6 samples, with metal stacking (Ti/Ni/Ti/Ni=30/200/30/50), have been fabricated. These samples were bonded with 70um Si pieces, and were sent back to school for Si thinning.
-- The previous batch of samples were processed with Ni dots writing. Even though the sample surface wasn’t clean enough last time, but the Ni dots look ok through microscope.
-- The layout of the Ni-InGaAs diffusion fin channels was re-designed, and the EBL writing sequence .
-- Three set of new samples were under fabrication, and the 2nd EBL writing for fin structures has been finished.
Previous test with Si holder:
Planned test with SiC holder:
1st EBL - Markers
2nd EBL – Fin
3rd EBL – Ni Source
-- 8 units, the fin writing was not so good
-- will be used for annealing time test
-- 8 units, the fin writing was good
-- will be used for 250’C annealing study
-- 12 units, the fin writing is under process
-- will be used for 300’C annealing study
-- two InGaAs samples with 8 units, in case of problems during the process
-- There two set of samples can be used for 275’C test, and 325’C if both work
-- 250’C and 300’C diffusion study
-- SEM, AFM characterization