Weekly group meeting report
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Weekly Group Meeting Report. Renjie Chen Supervisor: Prof. Shadi A. Dayeh. Summary. For neural probe samples:

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Weekly Group Meeting Report

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Weekly Group Meeting Report

Renjie Chen

Supervisor: Prof. Shadi A. Dayeh


Summary

  • For neural probe samples:

    -- A new batch of 6 samples, with metal stacking (Ti/Ni/Ti/Ni=30/200/30/50), have been fabricated. These samples were bonded with 70um Si pieces, and were sent back to school for Si thinning.

    -- The previous batch of samples were processed with Ni dots writing. Even though the sample surface wasn’t clean enough last time, but the Ni dots look ok through microscope.

  • For InGaAs samples:

    -- The layout of the Ni-InGaAs diffusion fin channels was re-designed, and the EBL writing sequence .

    -- Three set of new samples were under fabrication, and the 2nd EBL writing for fin structures has been finished.


Annealing modification

Previous test with Si holder:

Planned test with SiC holder:


ProcessofNi-InGaAsDiffusion Study

Process

1st EBL - Markers

2nd EBL – Fin

3rd EBL – Ni Source

  • Only InGaAs <110> & <100> orientations are present in the new design

  • More fin widths are included in one set of fins

  • The EBL writing sequence was also changed


68

32

147

89

81

475nm

286

186

95

61

52

45


Three Samples in Process

Sample 1

-- 8 units, the fin writing was not so good

-- will be used for annealing time test

Sample 2

-- 8 units, the fin writing was good

-- will be used for 250’C annealing study

Sample 3

-- 12 units, the fin writing is under process

-- will be used for 300’C annealing study


Plan

  • Prepare another two set of InGaAs samples

    -- two InGaAs samples with 8 units, in case of problems during the process

    -- There two set of samples can be used for 275’C test, and 325’C if both work

  • Carry out the annealing to existing two set of samples

    -- 250’C and 300’C diffusion study

    -- SEM, AFM characterization


Thank youQ&A


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