1 / 10

Devang Parekh 3/21/07 EE235

Highly Parallel Fabrication of Nanopatterned Surfaces with Nanoscale Orthogonal Biofunctionalization Imprint Lithography H. E. Gaubert and W. Frey, Nanotechnology 18 (2007) 135101. Devang Parekh 3/21/07 EE235. Overview. Motivation Fabrication Results Conclusion. Motivation.

kelly-montoya
Download Presentation

Devang Parekh 3/21/07 EE235

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Highly Parallel Fabrication of Nanopatterned Surfaces with Nanoscale Orthogonal Biofunctionalization Imprint LithographyH. E. Gaubert and W. Frey, Nanotechnology 18 (2007) 135101 Devang Parekh 3/21/07 EE235

  2. Overview • Motivation • Fabrication • Results • Conclusion

  3. Motivation • Nanopatterned surfaces • Biosensors • Tissue engineering scaffolds • Bio-Mems • Self-assembly techniques • Pattern parameters • Pattern defects • Lack of dual functionality • E-beam and Ion-beam • Serial • Cost prohibitive

  4. Fabrication • Step and Flash (SFIL) • Quartz template • Bottom Antireflective Coating (BARC) planarization layer • BARC spin-coated 45nm • Low-viscosity resist • Photoresist fills template • Harden PR with UV exposure • Step M. Stewart, et. al, J. Microlith., Microfab., Microsyst. 4, 011002 (2005)

  5. Fabrication • O2 etch residual photoresist • 2nd O2 etch to transfer pattern to BARC • Evaporate 3nm of Cr • Evaporate 17nm of Au • Lift-off

  6. Fabrication • O2 plasma remove residual organics • Hexadecanethiol (HDT) • Polyethylene Glycol-silane (PEG-silane) • Fibronectin • Human umbilical vein endothelial cells (HUVECs)

  7. Results • AFM physico-chemical mapping • Force is random for untreated • HDT is hydrophobic • PEG is less hydrophilic than clean wafer • nm-resolution of physico-chemical differences

  8. Results

  9. Results

  10. Conclusion • Soft litho->micro NOBIL->nano • Orthogonal functionalization shown • Simple and cheap fabrication • Possible extension to glass or polymer substrates

More Related