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J.Y.Kim and Kinam Kim, et all (Samsung Electronics) 2005 Symposium on VLSI Technology

S-RCAT(Sphere-shaped-Recess-Channel-Array-Transistor) Technology for 70nm DRAM feature size and beyond. J.Y.Kim and Kinam Kim, et all (Samsung Electronics) 2005 Symposium on VLSI Technology Wookhyun Kwon. This is a story about…. How to solve a difficult problem of DRAM technology.

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J.Y.Kim and Kinam Kim, et all (Samsung Electronics) 2005 Symposium on VLSI Technology

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  1. S-RCAT(Sphere-shaped-Recess-Channel-Array-Transistor) Technology for 70nm DRAM feature size and beyond J.Y.Kim and Kinam Kim, et all (Samsung Electronics) 2005 Symposium on VLSI Technology Wookhyun Kwon

  2. This is a story about…. How to solve a difficult problem of DRAM technology. It was a great idea like the Egg of Columbus. Egg of Columbus

  3. DRAM Operation Storage Capacitor Gate Bit Line Vstorage = Qc / Cstorage Key of DRAM operation • How long the storage node maintain the stored charge?  Target >100msec

  4. Motivation: Data Retention Time Issue • Scaling Rule Xj DIBL GIDL Junction Leakage • Channel length scaling is a necessity for small cell size. But… • Short channel  Enhance DIBL • Thin gate oxide  Enhance GIDL • High Nsub & Shallow junction depth  Increase junction leakage. • We could not obtain sufficient data retention time near 100nm tech.  How to solve this problems?

  5. Suggested Solutions • High Tech. • High-K material (for Gox and Storage cap.) • Increasing Cs • Thick gate oxide • SOI (Silicon on Insulator) • Reduce DIBL Increasing Fab. Cost!

  6. Simplest way is… Making a long channel length in same area. • Planar • RCAT Xj RCAT (Recessed Channel Array Transistor) DRAM (512Mb, ’03) • Long effective channel length & Deep junction depth. • Improve refresh characteristics

  7. 1st Generation RCAT • RCAT Scaling Recess Depth But, by increasing recess depth • Sharp curvature problem  Gox reliability • Uniformity • Neck part enlargement Chemical Dry Etching

  8. 2nd Generation RCAT= S-RACT Poly Void S-RCAT (Shere-shaped RCAT) DRAM (2Gb, ’03) • Larger effective channel length • Larger curvature  small vertical field  suppress GIDL • Small junction depth

  9. Process Sequence Isotropic Dry Etching Oxide spacer Key Process • Oxide spacer for protecting Si-neck-enlargement • Isotropic dry etch (Low power silicon etch) • Steam RTP oxidation or Plasma oxidation

  10. Electrical Characteristics • Good uniformity of Vth (250mV) • Improving DIBL (80mV  40mV) • Smaller junction leakage • Improving data retention time

  11. DRAM Cell Size Trend S-RCAT We are now here! Who? Source (IRTS 2006) • 46nm (Half pitch) • 6F2 • S-RCAT

  12. Summary • In DRAM technology, the data retention was the big problem. • Using RCAT structure, we could solve the problem by increasing the effective channel length in same cell size. • It don’t need a significant high-technology. • The great idea comes from very simple idea.

  13. Thank you. Questions?

  14. Reference

  15. More Scaling • S-RCAT has a good scalability to sub-50nm. • Below 40nm, the isolation between balls (C ) will be a limiter. • for further scaling below, another breakthrough in technology is needed.

  16. 4F2 with Vertical Transistor

  17. 6F2 Architecture • 25% cell size reduction The 6F2 architecture have • Diagonal direction of channel • Non-planar channel (RCAT) Source (Samsung)

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