Inorganic materials for biomems
This presentation is the property of its rightful owner.
Sponsored Links
1 / 8

Inorganic Materials For Biomems PowerPoint PPT Presentation


  • 93 Views
  • Uploaded on
  • Presentation posted in: General

Inorganic Materials For Biomems. Anne Samuel. Inorganic Materials. Materials used for micropumps and valves Thin-Film Shape Memory Alloy(NiTi) Actuated Micropump NiTi/Si Diaphragm Micropump Micromachined pump based on thick-film piezoelectric actuation.

Download Presentation

Inorganic Materials For Biomems

An Image/Link below is provided (as is) to download presentation

Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.


- - - - - - - - - - - - - - - - - - - - - - - - - - E N D - - - - - - - - - - - - - - - - - - - - - - - - - -

Presentation Transcript


Inorganic materials for biomems

Inorganic Materials ForBiomems

Anne Samuel


Inorganic materials

Inorganic Materials

  • Materials used for micropumps and valves

  • Thin-Film Shape Memory Alloy(NiTi) Actuated Micropump

  • NiTi/Si Diaphragm Micropump

  • Micromachined pump based on thick-film

    piezoelectric actuation.


Thin film shape memory alloy actuated micropump

Thin-Film Shape-Memory Alloy Actuated Micropump

  • Shape memory alloys are ones which undergoes

    phase transformation from one phase(austenite)

    to an another phase( Maternsite).

  • Used one way shape memory effect (OWSME) for actuation.

  • Two actuation configurations to perform actuation- Polyimide-Spring-Biased actuator(Polyimide + TiNi) & Complementary Actuator ( TiNi+TiNi).


Niti si diaphragm micropump

NiTi/Si Diaphragm Micropump

  • Micropump actuated by NiTi/Si composite diaphragm.

  • The recoverable force of NiTi thin film and biasing force of silicon membrane allows reciprocating motion of the pump.

  • Structure of a unit SMA/substrate bimorph.


Niti si micropump

NiTi/Si Micropump

  • Analysis of the actuation mechanism.

  • Thermal expansion coefficients of Si and SMA are different.

  • Depending on temperature, the bimorph structure will deform or be flat.


Thick film piezoelectric actuation

Thick-film Piezoelectric Actuation

  • Micropump with thick film /silicon micromachined hybrid actuation.

  • Actuation based on the flexure of screen printed PZT layer on Si membrane.

  • Schematic of hybrid actuated micropump.

  • Pump consists of top electrode, bottom electrode and PZT layer in the middle.


Thick film piezoelectric actuation1

Thick-film Piezoelectric Actuation

  • Experiment with different bottom electrodes.

  • To find high dielectric values of PZT layer-gives good mechanical acutation performance.

  • It was found that Au Cermet and evaporated Pt thin film gives good dielectric constant.

  • Candidate in medicine as a cheap disposable pump for drug dispensing.


References

References

  • Bernard.W, Kahn.H et.al. “ Thin-film shape memory alloy actuated micropumps”. Journal of Microelectromechanical system.1998. Vol 7. PP 245-251.

  • Koch.H, Harris.N et.al. “A novel micromachined pump based on thick-film piezoelectric actuation”. Sensors and Actuators, 1998. Vol 70. PP 98-103.

  • Xu.D, Wang.Li, et.al. “Characteristics and Fabrication of NiTi/Si diaphragm micropump”. Sensors and Actuators, 2001. Vol 93. PP 87-92.


  • Login