Broad-Bandwidth High-Resolution MEMS Array of
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PI : Dr. Andrei Shkel (MAE, EECS) Co-PI : Dr. Jann Yang (CEE) Co-PI : Dr. Patrick Guidotti (Math) PowerPoint PPT Presentation


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Broad-Bandwidth High-Resolution MEMS Array of Inertial Sensors with Embedded Optical Detection. University of California - Irvine. PI : Dr. Andrei Shkel (MAE, EECS) Co-PI : Dr. Jann Yang (CEE) Co-PI : Dr. Patrick Guidotti (Math). Innovations : Polymer MEMS technology

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PI : Dr. Andrei Shkel (MAE, EECS) Co-PI : Dr. Jann Yang (CEE) Co-PI : Dr. Patrick Guidotti (Math)

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Pi dr andrei shkel mae eecs co pi dr jann yang cee co pi dr patrick guidotti math

Broad-Bandwidth High-Resolution MEMS Array of

Inertial Sensors with Embedded Optical Detection

University of California - Irvine

PI: Dr. Andrei Shkel (MAE, EECS)

Co-PI: Dr. Jann Yang (CEE)

Co-PI: Dr. Patrick Guidotti (Math)

  • Innovations:

  • Polymer MEMS technology

  • Embedded optical detection (Fabry-Perot)

  • Micro-g resolution, wide frequency bandwidth (1kHz)

  • Each sensor is a dynamic optical multiplexer of the network

Enabled Applications: low-maintenance sensor networks, medical diagnostics, seismology, acoustic sensing, health monitoring of civil structures including micro-vibrations of high-tech facilities, navigation


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