Template HTA General Assembly November 12 – 13, 2013. Contact : Fraunhofer ENAS [email protected] Phone: +49-371-45001 412 / 220. Project Idea: Reliability Assessment with Qualified Material Data Sets EU Call: e.g. ICT Calls in LEIT ( e.g . ICT1-3), photonics KETs.
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HTA General Assembly
November 12 – 13, 2013
Phone: +49-371-45001 412 / 220
Project Idea short description:
Reliabilityalignedtechnologydevelopmentfor highlyminiaturizedproducts (MEMS, ICs, photonics, )
IP situation and commercial viability:
Firm 1: manufacturers of systems with dedicated need for accompanying failure avoidance analysis
Firm 2: testing tool manufacturer
RTO: material characterization (mechanical properties), device and system testing
BEoL stack region
Local residual stress
by FIB milling
the Si substrate