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1 . T itle : N ano Particle Contamination Control in the Semiconductor Manufacturing Process PowerPoint PPT Presentation


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SEMINAR. 1 . T itle : N ano Particle Contamination Control in the Semiconductor Manufacturing Process 2. S peaker : D r. Jaein Jeong (Samsung Electronics ) 3. T ime : 1 6 :00 – 17:30, Thursday, December 13, 2007

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1 . T itle : N ano Particle Contamination Control in the Semiconductor Manufacturing Process

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1 t itle n ano particle contamination control in the semiconductor manufacturing process

SEMINAR

1. Title : NanoParticle Contamination Control in the Semiconductor Manufacturing Process

2. Speaker : Dr. Jaein Jeong (Samsung Electronics )

3. Time : 16:00 – 17:30, Thursday, December 13, 2007

4. Place : e+ Lecture Hall (room 83188), 2nd Research Building, Sungkyunkwan University

5. Summary :

Nano-scale semiconductor devices play an important role to make human life better and memory device is a major technology driver in the semiconductor industry. However, with the shrinkage of the device’s feature size, nano particle contamination has emerged as a serious problem in the semiconductor manufacturing Fabs, which results in yield and productivity drop. In this seminar, the following issues concerning the challenge of nano particle contamination will be discussed;

- The number of nano-sized particles deposited on the wafer surface rapidly increases while their removal efficiency decreases.

- For the nano-size particle control, it is more important to understand the process reaction mechanism and to use proper defect inspection tools and methods.

- It has to be studied on the advanced particle control technology from the development of new materials.

- To control the particle generation on the process, continuous improvement for the process chamber and parts cleaning technology is needed.

- To understand the particle formation in the process equipment, we have to develop the in-situ process diagnostic tools, such as ISPM and PBMS.

6 Background :

Education

1997 Mechanical Engineering, Seoul National University, B.S

1999 Mechanical Engineering, Seoul National University, M.S

2002 Mechanical Engineering, Seoul National University, Ph.D

Work Experience

2002-2004 Researcher, Institute of Advanced Machinery and Design

2004-2005 Senior Engineer, Samsung Corning Research Center

2005- Senior Engineer, Manufacturing Technology Team 2, Memory Division, Samsung, Semiconductor Business, Samsung Electronics

7. Questions : Professor Taesung Kim (☏ 031-290-7466)

Sungkyunkwan University


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