Dimensional metrology as enabling technology for long-term fundamental research
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Dimensional metrology as enabling technology for long-term fundamental research. Triggers Targets Experimental realisation Metrological application of basic science & technology Enabling science & technology.

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Triggers targets experimental realisation metrological application of basic science technology

Dimensional metrology as enabling technology for long-term fundamental research

Triggers

Targets

Experimental realisation

Metrologicalapplication ofbasic science& technology

Enablingscience &technology

Research into fundamental constants, basic physics and future space science missions are critically dependent on dimensional metrology at levels of accuracy far exceeding those available

kg @ 1*10-8

kB @ 10-7

kg @ 1*10-9

Enabling new definition of kg @ 2*10-8level based on fundamental constants

Enabling progress of research into further fundamental constants and basic physics e.g.: G, h/m, (ST)EP…

Enabling space metrology and positioning capabilities @ 10-15

Enabling new determination of kB @ 10-6

Ultra stable materials and position metrology in cryogenic environments

Ultra stable structures for nano processing

Improved instrumentation for dimensional measurements

Specimen adapted interferometerPrecision velocity interferometer

3D metrology on artefacts: - pressure piston/cylinder area: ur < 10 nm - sphere resonator < 1 ppm- diaphragm area U < 10-5

length interferometry at the pm level

Micro/Nano thruster positioning capability

Surface effects

Nano radian angle metrology

Extended range (> 100 mm) high accuracy µCMM

Prismatic ultra-stable reference artefacts

Dilatometry & stability @ <10-10 level

Surface layer characterization

High speed simultaneous fringe fractioning & counting on multi-l

X-ray & opt. interferometry @ 3*10-9

Precision dilatometry & stability measurements@ <10-9 level

Higher power, reduced waveband fs comb technology

Existing procedures, instruments and light sources for precision interferometry & long-range metrology.

Improved temperature metrology

New ultra stable materials

2005 2010 2015 2020


Triggers targets experimental realisation metrological application of basic science technology

Dimensional metrology for advanced manufacturing technologies

Triggers

Targets

Experimental

realisation

Metrologicalapplication ofbasic science& technology

Enablingscience &technology

Cost effective sustainable manufacturing of innovative products with structures down to 10 µm and up to 10 m, facing requirements of increased complexity, normative requirements, higher measuring speed and reduced tolerances

Dimensional metrology < 10 m in measuring room (U < 10-7) in production environment (U < 10-6)

Short range dimensional

metrology 0.01 mm < L< 10 mm

U < 0.005 µm

U < 0.05 µm

U < 0.01 µm

Measuring instruments in labs for complex and freeform geometries

Measuring instruments for 10 m-range under industrial conditions

Measuring instruments for short range

under industrial conditions

Multi-parametric results from high resolution point clouds

Automatic uncertainty evaluation (virtual instruments)

Advanced traceability methods for in-process metrology

Artefacts for small objects or those with non-cooperative surfaces

Numerical artefacts – software datasets

Research facilities for metrology in non-laboratory environment

Probe-surface interaction including soft surfaces

Influences of environment (refractive index, temperature, vibrations, dust,…)

3D-Segmentation and evaluation of large data files

Fast and precise positioning (mechatronics, PZT motors,stick slip, DC, advanced servo controls

Next generation of sensors and measuring instrumentation

(Computer Tomography , indoor-GPS, Laser tracker, Laser interferometer, incremental scales, rangefinders/ADMS)

Existing procedures, sensor principles, ...

New materials, advanced computers and IT, ...

2005 2010 2015 2020


Triggers targets experimental realisation metrological application of basic science technology

Long range dimensional metrology

Triggers

Targets

Experimental

realisation

Metrologicalapplication ofbasic science& technology

Enablingscience &technology

Research into large scale production, global monitoring and waste management depend critically on dimensional parameters being measured or controlled to levels of accuracy that are currently unachievable over longer ranges (L > 10 m up to several km)

10-7 3D accuracy in large scale production

Traceable verification of global mapping systems at 10-6

10-6 3D accuracy inlarge scale production

10-7 1D accuracy over long range in air

10-8 1D accuracy over long range in air

Precision 3D measuring instruments and sensors up to 100 m range

Advanced 3D measuring instruments up to 100 m

Advanced refractometer

Long range calibrated terrestrial baselines

Long range free air refractometer

Large scale coordinate metrology test & comparison facility

High speed simultaneous fringe fractioning and counting on multi wavelengths

Refractive index metrology over extended ranges

Precision total stations with up to 1 km range

Multi-wavelength ADM/ refractometry

Multi-wavelength interferometry

Metrological class precision laser trackers

Existing metrology for long range 1D/2D: Laser trackers, ADM, total stations, µGPS, ..

New light sources, e.g.:Higher power, reduced waveband fs comb technology

2005 2010 2015 2020


Triggers targets experimental realisation metrological application of basic science technology

Dimensional metrology for micro-nano technology

Triggers

Targets

Experimental realisation

Metrologicalapplication ofbasic science& technology

Enablingscience &technology

European micro- and nano-technology is reaching increasing levels of miniaturisation and encountering new issues of health, production feasibility, quality and efficiency; for control and manuf. on µm/nm-scale metrology is needed!

Nanoparticles: traceable counting, size, shape and distribution on 1 nm accuracy level

Traceable 2D(3D) metrology at sub-nm accuracy over sub-mm range

Traceable 2D(3D) metrology at (sub)-nm acc. over several 100 mm range

Instrumentation for multi-parametrical characterization of new functional nano-materials

Single probe 2D(3D) instrumentation with mm range

Multi probe 2D(3D) instrumentation over longer range

Traceable instrumentation for micro&nano-particles

Cross calibration of sensors

Improved & new high resolution microscopy methods

Nanostandards over sub-mm range

Nanostructured standardsover several 100 mm range

Modelling of functional properties dependent on material and dimension

Nanoparticle standards

Probe surface interaction modelling

New sensors/probes

Correlation of local and global particle metrology methods

2D(3D) positioning capabilities; self calibration

X-ray/optical interferometry, linear encoders

Stable materials/structures & design principles, vacuum bearing technology, vacuum thermal metrology

Nano force metrology

Existing high resolution microscopy, position measurement, probes, data evaluation and micro/nano-fabrication methods (top-down)

New technologies and materials (short wavelength lasers, nanotubes, …)

Improved Nano fabrication (top down & bottom up)

2005 2010 2015 2020 2025


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