Choice of the cleanroom
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Choice of the cleanroom. Laser specifications  class 10,000. a) Hard wall cleanroom. b) Softwall cleanroom. Entire room = cleanroom. Laser size = cleanroom. - Special hard wall, Powerfull filter, Special clothing. Movable: used in H4/USC55 best control. Entire room = cleanroom.

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Choice of the cleanroom

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Choice of the cleanroom

Choice of the cleanroom

Laser specifications  class 10,000

a) Hard wall cleanroom

b) Softwall cleanroom

Entire room = cleanroom

Laser size = cleanroom

  • - Special hard wall,

  • Powerfull filter,

  • Special clothing

  • Movable: used in H4/USC55

  • best control

Entire room = cleanroom


Choice of the cleanroom

Softwall cleanroom  customer design

2.4 m

With FFU

1.3 m

1.9 m

Main problem:safety agreement for curtain

TIS approval for one industrial product (non-transparency)

One company agree to apply it.


Choice of the cleanroom

Fan filter unit (FFU): 2 choices, dependent on air-conditioning

Old air-unit from Aleph

OK

NO

b) FFU with air-conditioning included

softwall: special design

  • Standard FFU,

  • Standard softwall,

  • installation ?

Question: air renewal inside each room ?


Choice of the cleanroom

Air-conditioning

Laser specifications  +/- 1 oC

HEPair

Class 10,000 & +/- 0.5 oF (+/- 0.28 oC)

HEPair

  • 208vac, 50Hz

  • Cooling capacity:9050 BTU/H

  • Temperature:0.6/2.0 kW

  • type: PID

  • Accuracy:+/- 0.5 oF

36cm

  • Condenser:

  • Flow rate: 1-2.5 GPM (0.3 – 0.68 m3/h)

  • water temperature maxi: 85 oF (29 oC)

  • water side pressure drop: 0.8-3.4 psi (55-234 mbar)

60cm

120cm


Choice of the cleanroom

Old air-unit from Aleph: (R.Pintus)

12kW, Chilled water air-conditioning unit.  Temperature ?

~ 6oC

Control ? (PID, thermostat)…

?

USC55: mixed water, 16oC for each laser enclosure

Laser2

(Spare)

laser3

laser1

+/- 1 oC

(+/- 1 oC)

+/- 1 oC


Choice of the cleanroom

Cost estimation

Softwall :

Solution handling, Germany

3 softwalls with special curtain

~ 12 000 €

+

Fan Filter Unit:

+

HEPair:

3 units MAC 10XL

~ 13 000 €

~ 2 200 €

+

+

Old air-unit

Cost installation & test, H4?

Cost installation H4 ?


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