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Via Topology for 3-D Integration

Via Topology for 3-D Integration. 7 April 2000 Peter W. Wyatt and Paul V. Davis wyatt@LL.mit.edu 781-981-7882 voice 781-981-7889 fax. Via Topology Introduction. Interconnect reticle set is being designed to test four options for vertical vias connecting three wafers

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Via Topology for 3-D Integration

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  1. Via Topology for 3-D Integration 7 April 2000 Peter W. Wyatt and Paul V. Davis wyatt@LL.mit.edu 781-981-7882 voice 781-981-7889 fax

  2. Via Topology Introduction • Interconnect reticle set is being designed to test four options for vertical vias connecting three wafers • Explore variations of design rules • Optimize process for high yield • Minimize reticle cost by using the same reticles for all three wafers to the extent possible • Bottom wafer is always upright during assembly • Top two wafers may be either inverted or upright • Initial work used inverted wafers • Vias may be either offset or concentric • Initial work used offset vias

  3. Offset Via Topology with Inverted Circuits -- The Original Passivation cut Oxide M1 M1 W3 Shallow vias M3 M1 W2 M1 M2 Deep vias M3 Bonding layer W1 M4 M4 M3 M2 M1 M1 Si wafer • All layers are the same on all 3 circuits except deep via and Metal 4 • Mask count: Remove, M1, V12, M2, V23, M3, SV, DV12, DV23, M4W2, M4W3, Passivation = 12 masks • Cannot have a transistor lined up with a shallow or deep via

  4. Chip Topology with Inverted Assembly Cell 1Bottom Cell 1Bottom Cell 1Bottom Cell 1Bottom Cell 1Top Cell 1Top Cell 1Top Cell 1Top Cell 2Bottom Cell 2Bottom Cell 2Bottom Cell 2Bottom Cell 2Top Cell 2Top Cell 2Top Cell 2Top Bottom wafer, upright Top wafer, inverted Both wafers the same through metal 3 • Use a single reticle set for all three wafers to save cost • Inverted assembly creates two copies of each structure • One is useful, the other is not • Does not occur with upright assembly • Not an issue for real circuits

  5. Offset Via Topology with Inverted Circuits --Chain of Deep Vias M4W3 DV23 M4W2 DV12 M3 Si wafer • Deep vias and metal 4 are different on each wafer, but all other layers are the same on all three • Shallow via chain is easy, the same on wafers 2 and 3

  6. Offset Via Topology with Inverted Circuits --Chain of Both Shallow and Deep Vias Extraneous metal M4W3 M1 DV23 M4W2 M1 DV12 SV M3 One period, 4 deep vias and 6 shallow vias Si wafer • Deep vias and metal 4 are different on each wafer, but all other layers are the same on all three • Creates extraneous floating metal, but that does no harm • A problem: these chains occupy large area because • They are long -- many thousand vias • Multiple copies are needed with design rule variations

  7. Offset Via Topology with Inverted Circuits --Making Chains Reusable M1 M3 DV23 M1 M3 DV12 M3 M1 Si wafer • Make the same structure work for multiple cases • Left and right instances of inverted • Inverted and upright • To save space on the reticle given the need for long chains • Requires M3W1 different than M3W2 => mask count = 13

  8. Offset Via Chain with Upright Circuits --Same Layout as Inverted M3 DV23 M1 M3 DV12 M1 M3 M1 Si wafer • Allows transistor below shallow or deep via

  9. Concentric Via Topology with Inverted Circuits M3 DV23 Bonding layer DV12 Bonding layer M3 M3 (same as W3) M2 M1 Si wafer Passivation cut • M1 and M3 must both be different on W2 and W3 • M1 is the same on W1 and W2; M3 is the same on W1 and W3 • One more mask => count = 14 • Masks if this were the only type of via: Remove, M1W1&2, M1W3, V12, M2, V23, M3W1&3, M3W2, DV12, DV23, Passivation; count = 11 M1 M3 M3 M1 (same as w2)

  10. Concentric Via Topology with Upright Circuits M3 M3 M3 M1 M1 M1 M1 DV23 M1 DV12 M3 Si wafer Passivation cut • M3 is different on W1 and W2; W1 and 3 can be the same • M1 is the same on all wafers • No added mask • Masks if this were the only type of via: Remove, M1, V12, M2, V23, M3W1&3, M3W2, DV12, DV23, Passivation; count = 10 M3

  11. Concentric Via Topology with Inverted CircuitsComplete Chain M3 M3 DV23 DV23 DV23 DV23 M1 M1 M3 M3 DV12 DV12 DV12 DV12 M3 M3 M1 M1 Si wafer • M1 is the same on W1 and W2; M3 is the same on W1 and W3 • M2 is the same on all three wafers • Left and right instances are both good • Cannot make inverted and upright with the same layout • Possible with offset vias because M4 is patterned after assembly

  12. Via Topology -- Status • Four types of via have been evaluated • Most reticles can be used for all three wafers • All four types of via can be fabricated with 14 reticles • Many different via chains must be laid out • Some layouts can produce more than one type, saving space • Layout of offset via chains is in progress • Concentric via layout will follow

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