H ardware setup
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H ardware setup. Probestation 1: 6“ (200mm * 300mm + 360° rotation + 15mm Z) QTC Instruments : HP4274A (LCR), K6517 (electrometer) , HP6614C (voltage supply), K595 (quasistatic CVmeter) Status: Operational (used to measure Hamamatsu)

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H ardware setup

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Hardware setup

Probestation 1:6“(200mm * 300mm + 360° rotation + 15mm Z)QTC

Instruments: HP4274A (LCR), K6517 (electrometer) , HP6614C (voltage supply), K595 (quasistatic CVmeter)

Status: Operational (used to measure Hamamatsu)

Software (user friendly and some error protections)

Probestation 2:6“(200mm * 100mm + 15mm Z)IQC

Instruments: LCR, electrometer, voltage supply

Status: Operational

Misc: Homemade relay system (17 channels each)

Optical Inspction: Zeiss CMM (500*500*500) Res.: 1mm (Z~5mm)


Chuck


Probestation


Error estimation

1000 measurement runs on one strip (ST teststructure)


Software – Front panel

Testing

time ~ 2h


Hamamatsu

Karlsruhe

Probing marks


Pick up tool


Sensor

Teststructures

Packaging (Hamamatsu)

Sandwich packaging in

envelope

  • Bad to handle

  • Optical inspection  HANDLING  against specification

  • Takes time

  • Air cusion effect while placing  gliding


Packaging 2 (ST)

  • Optical inspection  very good

  • Easy to take out

  • All 4 TS available


Optical survey and dimensional measurements


Check Sheet:


Pictures

25mm


Scratchpad used

Add DC pad

3 AC pads

Rpoly

More pictures


Electrical characterization of sensors

Changes in measurement with respect to specs

Rpoly with 10V

Rpoly with 2V


Electrical characterization of sensors Summary


Electrical characterization of sensors CV & IV


Electrical characterization of sensors Rpoly


Electrical characterization of sensors coupling capacitance


Electrical characterization of sensors leakage current


Comparison of our test results with industry results (based on 5 sensor of 8 )

  • IV even lower than company measurement

  • CV perfect agreement

  • Some Rpoly higher than company measurement (but company only measured 1 per batch or even TS only)

  • No single strip fault (agreement) (neglect Rpoly)


Relevant problems

  • Nothing Serious

  • Vdepletion not calculated

Improvements:

  • Automatic web publishing (ready 50%)

  • Implement Pattern recognition


Optical survey of ST prototype

Pinhole or

bad coupling capacity

No strange electrical behavior


Optical survey of ST prototype 2

Asymmetric cut!

Global size OK!

Z (mm)

Bowl shape!


Pads


Electrical Survey

  • Very high total leakage current

  • Depletion voltage fine

  • One region (7 strip) with a very high leakage current

  • Some coupling capacitors out of specs


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