Improvement on ti al ni au electrical contacts on gan algan superlattices
This presentation is the property of its rightful owner.
Sponsored Links
1 / 7

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices PowerPoint PPT Presentation


  • 44 Views
  • Uploaded on
  • Presentation posted in: General

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices. ___________________________________________________________ Tzu-Yung Huang 1, , Yu Song 1 , Rajaram Bhat 2 , Chung-En Zah 2 , and Claire F. Gmachl 1

Download Presentation

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices

An Image/Link below is provided (as is) to download presentation

Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.


- - - - - - - - - - - - - - - - - - - - - - - - - - E N D - - - - - - - - - - - - - - - - - - - - - - - - - -

Presentation Transcript


Improvement on ti al ni au electrical contacts on gan algan superlattices

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices

___________________________________________________________

Tzu-Yung Huang1,, Yu Song1, Rajaram Bhat2, Chung-En Zah2, and Claire F. Gmachl1

1 Department of Electrical Engineering, Princeton University, Princeton, NJ 08544, USA

2 Corning Inc., Corning, NY 14831, USA

Work supported by PEI Grand Challenges Program


Improvement on ti al ni au electrical contacts on gan algan superlattices1

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices

___________________________________________________________

  • Quantum Cascade Lasers are used widely in trace gas sensing applications

  • III-Nitride materials have potential to achieve QCLs with emission wavelengths below 3µm, opening us up to a wider range of chemicals (C-H stretch vibration)


Improvement on ti al ni au electrical contacts on gan algan superlattices2

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices

___________________________________________________________

  • So far, the overall high electrical resistance causes the device to heat up, precluding any emission

  • We tried several recipes varying Titanium thickness while keeping Al/Ni/Au overlay thickness constant, and found the best results at 6nm (25Ω)

  • We also optimized the annealing recipe, having the best results at 800°C for 80s


Improvement on ti al ni au electrical contacts on gan algan superlattices3

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices

___________________________________________________________

Ti 6nm -----

Ti10nm-----

Ti40nm-----

A B C D E F G

-But hold on, are we sure that all of

that is from the electrical contacts?


Improvement on ti al ni au electrical contacts on gan algan superlattices4

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices

___________________________________________________________

  • To answer our question: we varied the gap distance between the outer and inner contact as well as the contact size

  • What we found: the average sheet resistance is 748.5Ω! While the specific contact resistivity is only 2.87e-4Ω

  • Our metal contacts weren’t the main culprit! Now we can make a new emitter sample with a new design

Different contact sizes with varying gap spacing

Rsh: 842.15Ω

ρc: 3.43e-4Ω

Corrected Total Resistance vs. Gap Distance for

inner contact size 400 µm


Improvement on ti al ni au electrical contacts on gan algan superlattices5

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices

___________________________________________________________

Summary

  • Discover source of high device resistance

  • Measured sheet and specific contact resistance

    Conclusion

  • Extensive work experience in the clean room

  • Further understanding of Quantum Cascade Lasers and other related semiconductor devices that can be used for environmental applications

  • Results presented at MIRTHE Summer Workshop

  • Co-Author of conference paper to ITQW 2013

  • Will co-author journal publication

  • Continuation of the project during the school year

  • Provided insights into post graduation plans


Improvement on ti al ni au electrical contacts on gan algan superlattices6

Improvement on Ti/Al/Ni/Au Electrical Contacts on GaN/AlGaN Superlattices

___________________________________________________________

Thank You!


  • Login