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太阳电池及生产线相关问题 PowerPoint PPT Presentation


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太阳电池及生产线相关问题. 主要内容. 一、 光伏产业简介 二、 半导体车间的基本知识 三、 丝网印刷电池简介 四、 电池工艺简介. 一、光伏产业简介. 1.1. 太阳能发电的概念 太阳电池发电: 把照射到光伏电池上的光直接变换成电能输出的光伏发电是太阳能电池发电。 光感应发电: 光感应发电是利用某些有机高分子团,吸收太阳的光能后变成“光极化偶极子”的现象,正负电荷引出。 光化学发电 :光化学发电是指浸泡溶液中电极,受到光照后电极上有电流输出的现象。 液结光化电池 光电解电池 光催化电池.

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太阳电池及生产线相关问题

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1.1.


  • 1.2.


    • 1.3.

    • 1839A.EA.E,Bequral

    • 1883

    • 1954charbin6


  • 1973

  • 5080100

  • 621


    • 8010%15%

    • 90

    • 19971222000280MW20041400


1.4.


20m17-18


PERL /LBSF1BSF1VOC717mVPERL24.7

  • PERLLBSF


n++p++150mnFZ100, AM 1.5D, 2526~1016 cm-3npFZ122.7


p20.1%18.1%


  • MIS

MIS-IL500Al/SiOx/p-Si MISSiNx/Cs/SiOxFZ118.5%


n1cm CZa-Si BSFa-Si/c-Si120.0%HITHIT200a-Si BSFSRV50cm s-1


STARPECVD2m10.1%a-Si/poly-Sia-Si/poly-Si/poly-Si12.0%SiNxITOBSF


15PVSEC


2.1.


    • 2.2.







    • 30


2.3.

  • 43210

    • 4

    • 3

    • 2

    • 1

    • 0


  • 43210

    • 4

    • 3

    • 2

    • 1

    • 0


  • 43210

    • 4

    • 3

    • 2

    • 1

    • 0


.

3.1.

7501021 cm-3n+0.4m150m10



3.2.


25MW

QCQuality Control

PCProcess Control

CTClassification Tools/


.

4.1.

  • 4.1.1.


ncm-3

eC

cm2/Vs

cm


25 CB

=1015cm-3np255.0cm14.0cm


  • P

    • BAlGaInP


  • SPV-PCDPCD

    4.1.2.

    (SIMS)

    4.1.3.


a

rsth:k:lhklh k l


1h:k:l=1:0:0100100{100}


{110}{111}


    • 4.1.4.



4.2.

4.2.1.

ISC

NaOHKOHIPA


Na2CO3K2CO312Na3PO4.12H2OCH3COONa

      • HFHNO3


  • CH3COOH

  • H3PO4(85%)HF-HNO3

  • PS


  • RIE

    • Cl217.1225cm2

    • SF6/O2

    • SiO2

    • EDM20


RIE



SiN

EDM


4.2.2.



4.2.3.

  • NaOH

    • NaOH

    • Na2SO4Mg(OH)2Ca(OH)2

  • C2H6O

    • 95.57%

    • H2


  • HCl

    • 4010%

  • H2O2

    • H2O2

    • H2O2


  • HF

    • 30%-60%

    • 5%50

  • HNO3


  • Na2SiO3

    • pH

    • 0.1%-1%

    • 2.4-3.3

  • IPA

    • 87.9%80.37

    • 12 28%


4.2.4.






QC


4.3.

4.3.1.p-n

  • RTPRTPRTPRTP

  • SOGRTPRTP

  • Sandia

  • IMECAPCVDRTP


  • UNSWSOD

  • DOSS

DOSS


  • pnn-pn-p6001

  • SODRTP


  • RTP900/s14.4%


5.5116


4.3.2.

4.3.2.1.


  • PN

  • POCl3BBr3


(

/)

lat

l=a

/t

R


Q:

D:

x:

t:


  • 4.3.2.2.

        • HCl


      • 95%-98%30

      • -


      • -





      • 10




4.3.2.3.

    • TCATCA1

      • 30

      • HCl:H20=1:1040

      • 10

        • A.

        • B. HF:H2O=1:103010

      • :=5:11102-3

      • POCl3A


4.3.2.4.

  • O2

  • N2


  • POCl3

    • POCl3

    • 00

  • TCA

    • TCA,TCA,

    • TCACl2COCl2

    • TCA25

    • TCA,

    • TCA

    • TCA4L/30


4.3.2.5.


TCA



QC



4.4.

4.4.1.p-n

  • RshRshJscFF2080

  • p-n

    • CF4


  • Heijjo



4.4.2.


    • 13.56MHz


4.4.3.

  • CF4

    • 4.4.4.



4.5.

4.5.1.


    • SiO2

      • SiO2FZ-Si20.6%

n=1.46EVA1.5


  • Si3N4

    • Si3N4Si3N4=300-1200nmn=2.0-2.2

    • LPCVDSi3N4

    • Si3N4

    • Si3N4

Si3N4SiO2UNSWSi3N4/SiO2FZ19.2%17.5%

LPCVDSi3N4SiNx:H LPCVD SiN5


  • CeO2

    • rf

    • CeO25.5eVDLAR

MgF2CeO2 MgF2/CeO21.72.8%(400-1100nm)

CeO2CeO2111CeO2111100CeO2/Si


  • SiON

    • PECVDLPCVDSiO2

    • N: O-

    • SiON10000cm/sn1.7

  • ZnS

    • MgF2110 nm MgF2/35 nm ZnS20 nmSiO2

    • ZnS


  • TiO2

    • APCVD

    • TiO2PV

    • n=1.90-2.45350 nm0.1TiO23

    • / TiO2/4501020nm5%5.8%SLAR

    • 0=600 nmntop=1.579, dtop=95.0 nm(nbot=2.494, dbot=60.1 nm)DLAR

    • (Al2O3)/ TiO23.5%

    • SiO2SiO2

    • TiO2


TiO2-xTiO2UV

1 mmEVATiO2


AR


d1

r1r2

n0n1n2

n1d1=0/4


n1=n0n2nsi=3.8nopt=1.9n0=1.52.3


4.5.2.TiO2

  • Ti(OC2H5)4

    • -55TiO2

  • CH3COOC4H9

    • 12025

  • 2-CH3(CH2)3CH(C2H5)CH2OH

  • CH3CH(CH3)2


4.5.3.TiO2



4.6.

4.6.1.


    • Nst

    • p-np+-p

    • SiO2Nst

    • 40020minSi-SiO2

    • PECVDUV


  • HFH2SO4n-SiFZ1 cm s-1

  • NH4F

  • HF/HNO3Si-H

    4.6.2.a-SiNx:H

    • a-SiNx:H

    • a-SiNx:Ha-SiNx:HJsc=34.1 mA/cm2TiO2/20nm-SiO2Jsc=34.0 mA/cm2

    • n=2.23RW=4.37AW=1.03%

    • RW=2.96%a-SiNx:HAW=1.74%


    • a-SiNx:H/SiO2a-SiNx:H

    • a-SiNx:HSiN

    a-SiNx:HSi:Nn=2.8 n=2.3JSC1 mA/cm2


      • a-SiNx:Hp-


      • APCVDLPCVDPECVD


    PECVD

    PECVD

    1500



    4.6.3.

    • SiH4

    • NH3

      • 25ppm18mg/m3


    4.6.4.


    p

    EFn+

    qVn+-p

    EFp

    n

    4.7.

    4.7.1.

    Pn


    n

    p

    EFn+

    qVn+-p

    qVn+-p-n+

    EFp

    qVn-p

    EFn

    n


    qVP-P+-V2

    p

    qVn-P-V1

    Sn+

    p

    Sn

    EFn+

    qV1

    EFp

    qV2

    qV

    EFpn

    n

    Wn

    W1

    WP

    W2

    W P+

    p+


    Al

    Al


    BSF800850AlSIMSBSFSEM


    BSF


      • GB

      • BSFGB

      • 557

      • 60K min-1

      • SiNxAl-Si


    T1()T2L1L2

    4.7.2.


    T

    TCE


      • Al-Si

      • SiAlAlSi

      • SiSi





    QC


    4.8.

    4.8.1.

    • /

    • 1 -cm2FF0.041

    • 700800

    • SiO2, B2O3, PbOZnOAgAg/Al


    2


    • :

      • (SDP)PV168

      • Ti/Pd/Ag

      • Cu/Ti

      • Cu/Ti/TiN

      • Cu/Ni

      • 40


    bus

    bus


    bus

    SWfS

    S

    Jmp/VmpJmp/Vmp0.055-0.06 3%



    4.8.2.

        • -N+-P+

      • /ipm1=2.5

      • /mm/min

      • /min


    4.8.3.


      • 3



      • 3-10/h

      • 10-3030%-90%

      • A7-80

      • 906070


      • 5-15min

      • 100-2005-15min

      • 140-20010-100mm/min


      • 350COCO2

      • 350-775



    4.9.

    4.9.1.

      • 1000 w/m2AM1.5



    FT,AM1.5()FS,AM1.5()TSAM1.5


    4.9.2.

      • AM1.5

      • 1000 w/m2

      • 25C



    IV




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