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太阳电池及生产线相关问题 PowerPoint PPT Presentation


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太阳电池及生产线相关问题. 主要内容. 一、 光伏产业简介 二、 半导体车间的基本知识 三、 丝网印刷电池简介 四、 电池工艺简介. 一、光伏产业简介. 1.1. 太阳能发电的概念 太阳电池发电: 把照射到光伏电池上的光直接变换成电能输出的光伏发电是太阳能电池发电。 光感应发电: 光感应发电是利用某些有机高分子团,吸收太阳的光能后变成“光极化偶极子”的现象,正负电荷引出。 光化学发电 :光化学发电是指浸泡溶液中电极,受到光照后电极上有电流输出的现象。 液结光化电池 光电解电池 光催化电池.

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太阳电池及生产线相关问题

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1.1.


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  • 1.2.


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    • 1.3.

    • 1839A.EA.E,Bequral

    • 1883

    • 1954charbin6


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  • 1973

  • 5080100

  • 621


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    • 8010%15%

    • 90

    • 19971222000280MW20041400


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1.4.


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20m17-18


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PERL /LBSF1BSF1VOC717mVPERL24.7

  • PERLLBSF


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n++p++150mnFZ100, AM 1.5D, 2526~1016 cm-3npFZ122.7


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p20.1%18.1%


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  • MIS

MIS-IL500Al/SiOx/p-Si MISSiNx/Cs/SiOxFZ118.5%


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n1cm CZa-Si BSFa-Si/c-Si120.0%HITHIT200a-Si BSFSRV50cm s-1


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STARPECVD2m10.1%a-Si/poly-Sia-Si/poly-Si/poly-Si12.0%SiNxITOBSF


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15PVSEC


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2.1.


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    • 2.2.


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    • 30


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2.3.

  • 43210

    • 4

    • 3

    • 2

    • 1

    • 0


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  • 43210

    • 4

    • 3

    • 2

    • 1

    • 0


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  • 43210

    • 4

    • 3

    • 2

    • 1

    • 0


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.

3.1.

7501021 cm-3n+0.4m150m10


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3.2.


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25MW

QCQuality Control

PCProcess Control

CTClassification Tools/


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.

4.1.

  • 4.1.1.


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ncm-3

eC

cm2/Vs

cm


25 c b

25 CB

=1015cm-3np255.0cm14.0cm


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  • P

    • BAlGaInP


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  • SPV-PCDPCD

    4.1.2.

    (SIMS)

    4.1.3.


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a

rsth:k:lhklh k l


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1h:k:l=1:0:0100100{100}


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{110}{111}


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    • 4.1.4.


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4.2.

4.2.1.

ISC

NaOHKOHIPA


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Na2CO3K2CO312Na3PO4.12H2OCH3COONa

      • HFHNO3


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  • CH3COOH

  • H3PO4(85%)HF-HNO3

  • PS


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  • RIE

    • Cl217.1225cm2

    • SF6/O2

    • SiO2

    • EDM20


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RIE


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SiN

EDM


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4.2.2.


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4.2.3.

  • NaOH

    • NaOH

    • Na2SO4Mg(OH)2Ca(OH)2

  • C2H6O

    • 95.57%

    • H2


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  • HCl

    • 4010%

  • H2O2

    • H2O2

    • H2O2


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  • HF

    • 30%-60%

    • 5%50

  • HNO3


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  • Na2SiO3

    • pH

    • 0.1%-1%

    • 2.4-3.3

  • IPA

    • 87.9%80.37

    • 12 28%


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4.2.4.


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QC


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4.3.

4.3.1.p-n

  • RTPRTPRTPRTP

  • SOGRTPRTP

  • Sandia

  • IMECAPCVDRTP


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  • UNSWSOD

  • DOSS

DOSS


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  • pnn-pn-p6001

  • SODRTP


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  • RTP900/s14.4%


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5.5116


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4.3.2.

4.3.2.1.


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  • PN

  • POCl3BBr3


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(

/)

lat

l=a

/t

R


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Q:

D:

x:

t:


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  • 4.3.2.2.

        • HCl


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      • 95%-98%30

      • -


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      • -


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      • 10


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4.3.2.3.

    • TCATCA1

      • 30

      • HCl:H20=1:1040

      • 10

        • A.

        • B. HF:H2O=1:103010

      • :=5:11102-3

      • POCl3A


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4.3.2.4.

  • O2

  • N2


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  • POCl3

    • POCl3

    • 00

  • TCA

    • TCA,TCA,

    • TCACl2COCl2

    • TCA25

    • TCA,

    • TCA

    • TCA4L/30


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4.3.2.5.


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TCA


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QC


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4.4.

4.4.1.p-n

  • RshRshJscFF2080

  • p-n

    • CF4


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  • Heijjo


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4.4.2.


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    • 13.56MHz


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4.4.3.

  • CF4

    • 4.4.4.


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4.5.

4.5.1.


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    • SiO2

      • SiO2FZ-Si20.6%

n=1.46EVA1.5


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  • Si3N4

    • Si3N4Si3N4=300-1200nmn=2.0-2.2

    • LPCVDSi3N4

    • Si3N4

    • Si3N4

Si3N4SiO2UNSWSi3N4/SiO2FZ19.2%17.5%

LPCVDSi3N4SiNx:H LPCVD SiN5


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  • CeO2

    • rf

    • CeO25.5eVDLAR

MgF2CeO2 MgF2/CeO21.72.8%(400-1100nm)

CeO2CeO2111CeO2111100CeO2/Si


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  • SiON

    • PECVDLPCVDSiO2

    • N: O-

    • SiON10000cm/sn1.7

  • ZnS

    • MgF2110 nm MgF2/35 nm ZnS20 nmSiO2

    • ZnS


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  • TiO2

    • APCVD

    • TiO2PV

    • n=1.90-2.45350 nm0.1TiO23

    • / TiO2/4501020nm5%5.8%SLAR

    • 0=600 nmntop=1.579, dtop=95.0 nm(nbot=2.494, dbot=60.1 nm)DLAR

    • (Al2O3)/ TiO23.5%

    • SiO2SiO2

    • TiO2


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TiO2-xTiO2UV

1 mmEVATiO2


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AR


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d1

r1r2

n0n1n2

n1d1=0/4


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n1=n0n2nsi=3.8nopt=1.9n0=1.52.3


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4.5.2.TiO2

  • Ti(OC2H5)4

    • -55TiO2

  • CH3COOC4H9

    • 12025

  • 2-CH3(CH2)3CH(C2H5)CH2OH

  • CH3CH(CH3)2


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4.5.3.TiO2


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4.6.

4.6.1.


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    • Nst

    • p-np+-p

    • SiO2Nst

    • 40020minSi-SiO2

    • PECVDUV


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  • HFH2SO4n-SiFZ1 cm s-1

  • NH4F

  • HF/HNO3Si-H

    4.6.2.a-SiNx:H

    • a-SiNx:H

    • a-SiNx:Ha-SiNx:HJsc=34.1 mA/cm2TiO2/20nm-SiO2Jsc=34.0 mA/cm2

    • n=2.23RW=4.37AW=1.03%

    • RW=2.96%a-SiNx:HAW=1.74%


  • 4454488

    • a-SiNx:H/SiO2a-SiNx:H

    • a-SiNx:HSiN

    a-SiNx:HSi:Nn=2.8 n=2.3JSC1 mA/cm2


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      • a-SiNx:Hp-


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      • APCVDLPCVDPECVD


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    PECVD

    PECVD

    1500


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    4.6.3.

    • SiH4

    • NH3

      • 25ppm18mg/m3


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    4.6.4.


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    p

    EFn+

    qVn+-p

    EFp

    n

    4.7.

    4.7.1.

    Pn


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    n

    p

    EFn+

    qVn+-p

    qVn+-p-n+

    EFp

    qVn-p

    EFn

    n


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    qVP-P+-V2

    p

    qVn-P-V1

    Sn+

    p

    Sn

    EFn+

    qV1

    EFp

    qV2

    qV

    EFpn

    n

    Wn

    W1

    WP

    W2

    W P+

    p+


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    Al

    Al


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    BSF800850AlSIMSBSFSEM


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    BSF


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      • GB

      • BSFGB

      • 557

      • 60K min-1

      • SiNxAl-Si


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    T1()T2L1L2

    4.7.2.


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    T

    TCE


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      • Al-Si

      • SiAlAlSi

      • SiSi


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    QC


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    4.8.

    4.8.1.

    • /

    • 1 -cm2FF0.041

    • 700800

    • SiO2, B2O3, PbOZnOAgAg/Al


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    2


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    • :

      • (SDP)PV168

      • Ti/Pd/Ag

      • Cu/Ti

      • Cu/Ti/TiN

      • Cu/Ni

      • 40


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    bus

    bus


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    bus

    SWfS

    S

    Jmp/VmpJmp/Vmp0.055-0.06 3%


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    4.8.2.

        • -N+-P+

      • /ipm1=2.5

      • /mm/min

      • /min


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    4.8.3.


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      • 3


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      • 3-10/h

      • 10-3030%-90%

      • A7-80

      • 906070


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      • 5-15min

      • 100-2005-15min

      • 140-20010-100mm/min


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      • 350COCO2

      • 350-775


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    4.9.

    4.9.1.

      • 1000 w/m2AM1.5


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    FT,AM1.5()FS,AM1.5()TSAM1.5


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    4.9.2.

      • AM1.5

      • 1000 w/m2

      • 25C


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    IV


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