Chemical Leak Finder

1. Semicon Pte Ltd Chemical Leak Finder

2. Semicon Pte. Ltd Chemical Leak Finder 1. Purpose • If a chemical leaks at the bottom of equipment or pipe fitting area, • An Engineer can confirm the chemical type by visual without inspection without using litmus paper • Even small leaks or fumes can be detected. • Therefore, an Engineer can find the exact leak point and can prevent • secondary accidents.

3. Semicon Pte. Ltd Chemical Leak Finder 2 2. Current Issues • An engineer needs Litmus paperto determine if a leak is acidic or alkali • Its not easy to find the exactleak pointat the bottom of the tool. • Its difficult to detect small volume leaks. • Its almost impossible to detectchemical fumes without leak detectors. • Its too expensive to install leak detectors in all areas • It’s difficult to confirm chemical type at upper plenum area because it is difficult to reach. • Can’t use Litmus paper due to particle and fire issues. If Litmus Paper meets Acid it will cause a burn

4. Semicon Pte. Ltd Chemical Leak Finder 3.Tool Weak Point * If a chemical leak occurs in the inside of tool, Engineers need litmus paper to check chemical type. They also need time to find the exact leak point. It is very dangerous for the engineer to spend too much time identifying the type and exact leak point inside the tool because long exposures can cause health issues.

5. Semicon Pte. Ltd Chemical Leak Finder 3 3. Line Weak point 2 * At the bottom of equipment and upper area of Plenum, there are many chemical pipe lines and difficult reach to check for leaks.

6. Semicon Pte. Ltd 3 Chemical Leak Finder 3 3. ValveareaWeak Point • Can’t confirm chemical type by visual • Need litmus paper if find liquid leak. • Can’t detect small size leak even if onje has a liquid leak detector • Can’t detect Chemical Fume • (Chemical fume is more dangerous)

7. Semicon Pte. Ltd Chemical Leak Finder 4 4. The Solution • If one installs leak finder at suspect areas, Engineers can easily find chemical leak points and type by visual inspection. • Leak finder can detect chemical fume and small leaks as well so engineers can prevent secondary accident with quick action * Leak finder material is PVC. It doesn’t catch fire nor generate particles.

8. Semicon Pte. Ltd Chemical Leak Finder 5 1 5 . ProductTest After install ACID Pipe ACID leak After install Alkali Pipe Alkali leak

9. Semicon Pte. Ltd 5 Chemical Leak Finder 2 5. ProductTest Paper type Bottom area of tool Acid chemical leak

10. 6 • Semicon Pte. Ltd Chemical Leak Finder 1 6. Chemical ReactionTest ( Sheet & Tape type) PH 2 PH 3 PH 10 PH 1 DIW PH 7~8 PH 9 PH 11 ■ Character : Same character with Litmus paper by Chemical optimization Can detect DI water Leak by visual. ■ ReactionTest : Different colors based on Acid & Alkali Ph concentration, It doesn’t melt even with 100% H2SO4

11. 6 • Semicon Pte. Ltd Chemical Leak Finder 2 6. Chemical ReactionTest ( C Ring type) PH 2 PH 3 PH 10 PH 1 DIW PH 9 PH 11 ■ Character : Can detect Acid, Alkali and DI water. Can use high temperature ( Max 100℃ ) ■ ReactionTest : Different colors based on Acid & Alkali Ph concentration, Can confirm chemical type by visual

12. 6 • Semicon Pte. Ltd Chemical Leak Finder 3 6. FumeReactionTest (C Ring Type) Pump Exhaust line (No Gas Flow ) Chamber BCL3 Gas flow Pump Exhaust BCL3 Gas flow React by ChlolineFume

13. Semicon Pte. Ltd Chemical Leak Finder 7 1 7. Product Type Ring Type Tape Type Leak Finder Product Sheet Type Wipes Type Apron Type

14. Semicon Pte. Ltd 7 Chemical Leak Finder 1 7. Product Type : C Ring Type ■ Application: Liquid DeliverypipeFitting ■ Size: Can supply Customer spec ( ¼” , ½” , ¾” , 1” , 2” etc. ) ■ Packing : 12EA / Box ■ Use : Acid & Alkali ■ Material : PE(Polyethylene)

15. 7 Chemical Leak Finder • Semicon Pte. Ltd 2 7. Product type :Tape Type ■ Application :Bottom area of tool ■ Size: 20mm ~250mm / 50m ■ Packing: 1 EA ■ Use: Acid & Alkali ■ Material : PVC (Polyvinyl chloride)

16. 7 • Semicon Pte. Ltd Chemical Leak Finder 3 7. Product type : Wiper Type ■ Application: Tool Cleaning or out side cleaning Can check Chemical during cleaning ■ Size: 215mm * 215mm ■ Packing: 100EA ■ Use: Acid & Alkali ■ Material : Polyester Wiper type ■ Application: Working and Repair ■ Size: 770mm * 620mm ■ Packing: 10EA ■ use: Acid & Alkali ■ Material : PU Coating and no Particle

17. 7 • Semicon Pte. Ltd Chemical Leak Finder 3 7. Product type : Pipe cover

18. Semicon Pte. Ltd Chemical Leak Finder 8 8. Leak zone Install sample ■ Installed Tape and sheet type leak finder at base of tool. ■ Installed name and contact point sheet at corner area

19. 10 • Semicon Pte. Ltd Chemical Leak Finder Chemical Leak Finder 10. Benefit Can check Acid ,Alkali Prevent secondary accident Can detectChemical Fume by visual Can find exact Leak point Easy check chemical type by visual • This product doesn’t have any particleand fire issues and can detect Acid and Alkali chemicals by visual inspection. Its easily to find the exact leak point in order to prevent secondary accidents

20. 9 • Semicon Pte. Ltd Chemical Leak Finder 9. Product Feature Specifically designed for Chemical Lines No melting and fire issue for high concentration acid chemicals (PH 0~2) for Tape & Sheet No Particle issue No twisting or lifting with Chemical reaction Long life time inside of Fab. (Only reacts with chemicals and Direct Sun light)

21. 11 • Semicon Pte. Ltd Chemical Leak Finder 11. RFID Reader for Safety Patrol After the engineer attaches an RF Tag at the Leak zone, Engineer can input Leak status (OK/no good) Can manage Patrol history with status Option : 1D, 2D BARCODE SCANER 및 CAMERA MODULE ■ RFID READER with Software