http://www.d-r-t.com/sensortech.htm. http://news.thomasnet.com/fullstory/463874. Automotive Sensors: MEMS. Chris Mosser. Outline. Introduce MEMS Applications Automotive Specific Information Fabrication Packaging. http://eed.gsfc.nasa.gov/562/SA_MEMs.htm. http://www.memx.com/.
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Automotive Sensors: MEMS
Red Blood Cells ~ 10um
Human Hair thickness ~ 50um
Diaphragm with two embedded piezoresisters
By V. C. Venkatesh, Sudin Izman