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Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill )

Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ). Step 1. Step 2. Step 3. Step 4. Step 5. Step 6. Step 7. Step 8. Step 9. Step 10. Step 12. Step 11. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T.

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Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill )

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  1. Process Flow : Overhead and Cross Section Views (Diagrams courtesy of Mr. Bryant Colwill) Step 1 Step 2 Step 3 Step 4 Step 5 Step 6 Step 7 Step 8 Step 9 Step 10 Step 12 Step 11 T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

  2. Step 1: Cleaning Overhead View of Wafer Insert text here Starting Si Wafer & Sulfuric Acid / Peroxide Clean Cross-section View of Wafer Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

  3. Step 2: Overhead View of Wafer Insert text here. Plasma Enhanced Chemical Vapor Deposition Of Silicon Dioxide Cross-section View of Wafer Probably include picture and name of machine here Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

  4. Step 3: Lithography Patterning Overhead View of Wafer Lithography Patterning Cross-section View of Wafer Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

  5. Step 3: Lithography Patterning (cont.) Overhead View of Wafer name Lithography Patterning Cross-section View of Wafer Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

  6. Step 3: Lithography Patterning (cont.) Overhead View of Wafer name Lithography Patterning Cross-section View of Wafer name Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

  7. Step 4: Overhead View of Wafer INSERT Cross-section View of Wafer Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

  8. Step 5: Overhead View of Wafer insert Cross-section View of Wafer Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

  9. Step 6: Overhead View of Wafer insert Cross-section View of Wafer name Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

  10. Step 7: Overhead View of Wafer insert Cross-section View of Wafer Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

  11. Step 8: Overhead View of Wafer insert Cross-section View of Wafer name Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

  12. Step 9: Overhead View of Wafer name T T T T T Cross-section View of Wafer T T T T T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

  13. Step 10: Overhead View of Wafer Aluminum Removal by Acid Etch T T T T T T T T Cross-section View of Wafer T T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

  14. Step 11: Overhead View of Wafer name T T T T T Cross-section View of Wafer T T T T T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

  15. Step 12: Overhead View of Wafer name T T T T T Cross-section View of Wafer T T T T T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

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