Ken Gilleo PhD ET-Trends LLC

1. MEMS MOEMS Nano Workshop Nanotechnology 2 (Focus on devices) • Ken Gilleo PhD • ET-Trends LLC

2. Nanotechnology ID Crisis * No universal definition for nanotechnology. Definition: Ability to work at the molecular level, atom by atom, to create large structures with a fundamentally new molecular organization and novel and significantly improved physical, chemical, and biological properties. National Nanotechnology Initiative (NNI) Definition: a set of methods and techniques providing the fabrication of structures consisting of individual atoms, molecules or macromolecular blocks in the length scale of approximately 1 – 100 nm. It is applied to physical, chemical and biological systems in order to explore their novel and differentiating properties and functions arising at a critical length scale of matter typically under 100 nm. Source: “What is what in the Nanoworld 11-08. Definition: A field whose theme is the control of matter on an atomic and molecular scale. Generally deals with structures 100 nanometers or smaller, and involves developing materials or devices within that size. Wikipedia Chemistry: Science of the composition, structure, properties, and interactions of matter, especially atomic and molecular systems.

3. Why not use both Top-Down vs. Bottom-up • Bottom-Up-Nano (BUN) • Atom-by-atom • Feynman approach • Erik Drexler is leading advocate • AFM (microscope) is prime method • Some include chemical synthesis • Ultra-precise, no throughput yet • Revolutionary if and when it is done for complex systems • Top-Down Nano (TDN) • Start with unshaped material • Machine, cut, etch, drill, lase, or somehow fabricate to desired structure • Lower specificity, higher throughput • Semiconductors use TDN processing

4. Physics The NanoZone Our Big World Macro Meso Microbiology Electronics Science Micro Size Nano Chemistry Molecular Atomic Sub-atomic Particles The sciences overlap

5. Nanoscale Size Domains 1 mm Cells Pollen 100 mm MEMS M I C R O Mirror; 16m 10 mm Blood Cells Mites Bacteria 1 mm 100 nm Transistors Virus Next Gen 45nm 10 nm Proteins 1 nm Chemistry Atoms Physics

6. Nano-Science & Technology • Nanoscale Materials;particles, parts, tubes, wires, ropes, fibers, mesh • Nano-Optoelectronics; quantum dots/wires • Nano-Biomedical agents • MEMS and MOEMS– not much nano yet(NEMS) • Nano-Electronics • Discrete devices; e.g. transistors, sensors • Nano-ICs – emerging? When? • Circuits • Storage • Computing

7. Nano Building Blocks • Powders & thin films/coatings – old nano • Small 3D molecules • Bucky Balls (fullerenes) • Horns • Graphene • Carbon Nanotubes (CNT) • Wires & ropes • Self-assembling entities • Complex shapes (in future)

8. C C C C C C Carbon Nanotubes (CNT) Carbon Nanotubes: graphene cylinders closed at either end; new elemental form of carbon (C). Uses: semiconductors, electrically conductive non-metals, high thermal conductors and reinforcement - strongest known fibers. New uses are being discovered every monthly. CNTs are usually 1-50 nanometers in diameter and typically a few microns long.

9. Nano-Wires • Definition: wires with diameter < 100nm. • Electrically conducting, CNT, other materials. • Formation • AFM manipulation • Lithography • Spin/entangle • Grow continuously (like polymerization) • Filled CNT – by capillary action • Conductivity is quantized

10. Belt Drive Molecules as Machine Parts?

11. Nanoelectronics Evolution

12. Nanocarbon Focus • Quantum Devices have been built • Electrical: conductive/semiconductor • Thermally ultra-conductive; 4K wm/C • Key component for new electronics? • On most roadmaps since 2007 • Potential is still unknown

13. 2005 Nanoelectronics Today IBM Develops Alternative To Silicon Transistors Electronic News -- Electronic News, 4/27/2001 2007

14. Next Stage • R&D focus is CNT assembly & connections • Need to improve present nano-transistors • Need massively parallel processing • Future: nano-transistor integration (IC) • 5 – 10 years away, or longer • May not be CNTs or even carbon-based

15. Nano-Optoelectronics • Carbon NanoTube light source • Nanowires – new laser principle UC-Berkeley

16. Storage Tiny depressions melted by an AFM tip into a polymer medium represent stored data bits that can then be read by the same tip. IBM Millipede Thermomechanical AMF storage 2009 Breakthrough : "baroplastics" hard, but they soften under pressure; 1 TB/in2. memory density. IBM Racetrack Data is stored in domain walls between magnetic regions on a nanowire. No motion, no wear, extreme density, low power. Animation Demo

17. Nano-Mechanics Nano-Pen From S. Crucheon-Dupey, NanoInk

18. Biotechnology Combining MEMS & Nanotech

19. Potential Nano-Devices Will probably require packaging • Discretes; transistors & sensors • Optical devices; emitters, sensors • Integrated systems; Nano-IC • Bio-medical (with electro/electronic) • Nano-enhanced MEMS • Nano-passives; including wires/PCBs Maybe use as part of package

20. Nanotechnology Issues • Best Process bottom-up, top-down, “hybrid”? • How to move from lab to fab? • Where to focus – nanotech R&D disorganized • Clarification and leadership needed • Investors becoming vary; hype penalty

21. Investor Beware Session Conclusions • Embryonic – scope and potential yet unknown • “Nanoscale” being confused with “Nanotech” • Nanotechnology needs to clearly define itself • Quantum-effect nano has unknown potential • Disruptive potential; carbon-base electronics (organic)