GP AlkaTex Plus
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GP AlkaTex Plus. Problems of the standard process Reproducibility Bath life time ~ 4 to ~ 30 runs Small process window  For the most wafer qualities a different recipe. Problems of the standard alkaline process. Problems with standard KOH / IPA process

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GP AlkaTex Plus

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Gp alkatex plus

GP AlkaTex Plus


Problems of the standard alkaline process

Problems of the standard process

Reproducibility

Bath life time ~ 4 to ~ 30 runs

Small process window

 For the most wafer qualities a different recipe

Problems of the standard alkaline process


Process specification

Problems with standard KOH / IPA process

- Small process window – large amount of recipes necessary

- Oftentimes defects visible

Process specification

Wafer from one supplier texture with standard KOH / IPA solution.

Significant difference in texture quality on wafer to wafer.


Process specification1

Problems with standard KOH / IPA process

- Small process window – large amount of recipes necessary

- Oftentimes defects visible

Process Specification

Different textured parts on the same material


Process with alkatex plus

Pro

Shorter process time 20-30’

Less bath change necessary

Up to 40 Bath runs

Higher throughput

Less chemical consumption

- IPA

- KOH or NaOH

- DIW

More wafer qualities with one basic recipe combinable

Increase of cell efficiency (0.05 – 0.1%)

Increase of optical yield, due to more homogeneous texture

Con

No CON’s known

Process with AlkaTex Plus


Microscope pictures

Standard vs. GP AlkaTex Plus texture

 Better process control for pyramidal size. Process is tunable.

 Very small defect rate for new texture process

 Very stable run to run repeatability, not depending on wafer surface condition (only slight adjustments necessary).

Microscope pictures

A good standard texture (l. ~6-8µm)

and a standard GP AlkaTex Plus texture (r. ~2-3µm)


Sem pictures of alkaline texture

SEM pictures of alkaline texture

SEM picture 45° tilted view 1000x (l.) and 5000x (r.) of a standard GP AlkaTex Plus textured wafer.


Sem pictures of alkaline texture1

SEM Pictures of alkaline texture

SEM picture (2500x) (same material) of a standard KOH/IPA (l.) and GP AlkaTex Plus (r.) textured wafer.


Reflectivity measurement

Reflectivity measurement

Reflection curve of standard KOH / IPA textured wafer and new GP AlkaTex Plus textured wafer


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