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真空晨会报告

真空晨会报告. 2009-06-28. 主要工作. 安装探针. 目前真空系统状态. 内真空: 2 台主分子泵 +2CP ; 外真空: 2 台分子泵; 低杂波: 1 套分子泵机组; 目前烘烤: 感应烘烤: 0 内衬烘烤: 10 A 管道烘烤: 100 V. 装置各处真空度演变. 内真空 质谱.

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真空晨会报告

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  1. 真空晨会报告 2009-06-28

  2. 主要工作 • 安装探针

  3. 目前真空系统状态 • 内真空:2台主分子泵+2CP; • 外真空:2台分子泵; • 低杂波:1套分子泵机组; • 目前烘烤: • 感应烘烤:0 • 内衬烘烤:10 A • 管道烘烤:100 V

  4. 装置各处真空度演变

  5. 内真空 质谱

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