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ECE 874: Physical Electronics. Prof. Virginia Ayres Electrical & Computer Engineering Michigan State University ayresv@msu.edu. Lecture 03, 06 Sep 12. Motivation:. Show order: http://www.siwafers.com/100-mm.htm Show real wafers: plain and with circuits. Motivation:.
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ECE 874:Physical Electronics Prof. Virginia Ayres Electrical & Computer Engineering Michigan State University ayresv@msu.edu
Lecture 03, 06 Sep 12 VM Ayres, ECE874, F12
Motivation: • Show order: http://www.siwafers.com/100-mm.htm • Show real wafers: plain and with circuits VM Ayres, ECE874, F12
Motivation: • Wafer with circuits: pn junctions are inside the wafer, only the interconnects are on tops and bottoms: + Battery - Principles of Electronic Devices, Streetman and Bannerjee VM Ayres, ECE874, F12
Motivation: Moving in <111> direction ~ 2 eV Moving in <100> direction only ~ 1 eV VM Ayres, ECE874, F12
These are directions to planes: Moving in <111> direction ~ 2 eV A {100} plane Moving in <100> direction only ~ 1 eV VM Ayres, ECE874, F12
These are directions to planes: Moving in <111> direction ~ 2 eV A {111} plane Moving in <100> direction only ~ 1 eV VM Ayres, ECE874, F12
z a a x a y These are directions to planes: A {100} plane To say which {100}, need a coordinate system and an origin O. VM Ayres, ECE874, F12
1.2.5 Miller indices Ii, iii, iv VM Ayres, ECE874, F12
+z a a +x a +y O VM Ayres, ECE874, F12
+z a a +x a +y O VM Ayres, ECE874, F12
+z a a +x a +y O VM Ayres, ECE874, F12
+z a a +x a +y O VM Ayres, ECE874, F12
+z a a +x a +y O VM Ayres, ECE874, F12
+z a a -x a +y VM Ayres, ECE874, F12 O
6 equivalent {100} planes: VM Ayres, ECE874, F12
6 equivalent <100> directions: VM Ayres, ECE874, F12
[110] VM Ayres, ECE874, F12
Lecture 01, slide 19: Distance d between parallel planes: Example problem: what is the distance d between the parallel {111} planes? VM Ayres, ECE874, F12
Lecture 01, slide 19: Distance d between parallel planes: Example problem: what is the distance d between the parallel {111} planes? VM Ayres, ECE874, F12
Example problem:(a) find the Miller indices of the plane shown below (Fig. 1.7 (a))(b) find the distance d between its parallel planes VM Ayres, ECE874, F12
(a) (b) VM Ayres, ECE874, F12
[110] VM Ayres, ECE874, F12
Example problem:(a) find the angle q between the [111] and [001] directions (b) find the angle q between the [111] and [110] directions(c) find the angle q between the [111] and [362] directions(d) find the angle q between the [111] and [001bar] directions VM Ayres, ECE874, F12
(a) VM Ayres, ECE874, F12
(b) VM Ayres, ECE874, F12
(c) VM Ayres, ECE874, F12
(d) VM Ayres, ECE874, F12
Example problem: the surface of a Si wafer is a (001) plane. Which, if any <110> directions are perpendicular to the Si wafer (001) plane direction? VM Ayres, ECE874, F12