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Antifuse and Rupture

Antifuse and Rupture. Antifuse Technology. Polysilicon. ONO. Metal - 3 Top Electrode. Amorphous Silicon. FOX. N++. Dielectric. thermal oxide. Metal - 2 Bottom Electrode. CVD nitride. thermal oxide. TD Amorphous Silicon Antifuse ‘Pancake’ Stack Between Metal 2 and 3

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Antifuse and Rupture

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  1. Antifuse and Rupture

  2. Antifuse Technology Polysilicon ONO Metal - 3 Top Electrode Amorphous Silicon FOX N++ Dielectric thermal oxide Metal - 2 Bottom Electrode CVD nitride thermal oxide TD Amorphous Silicon Antifuse ‘Pancake’ Stack Between Metal 2 and 3 Designed for 3.6V Operation in Sea Of Gates FPGA ‘Logic’ Devices Program at ~ 10V ‘Substrate’ Devices Program at ~ 30V Thickness ~ 500 - 1000 Å R = 20 - 100 ohms ONO Antifuse Poly/ONO/N++ Heavy as doped Poly/N++ Thickness controlled by CVD nitride Programs ~ 18V Typical Toxono ~ 85 Å RH1280 Toxono = 99 Å R = 200 - 500 ohms

  3. Quicklogic ViaLink Antifuse Antifuse Construction

  4. Antifuse Radiation Effects • Unprogrammed Reliability is the Key Concern • ONO • Amorphous Silicon (AS) • Manufacturers: • Actel (ONO, Silicon) FPGA • L-M (ONO) PROM • Pico Systems (AS) Programmable Substrate • Quick Logic (AS) FPGA • UTMC (AS) PAL, PROM

  5. Gate Rupture

  6. Comparison of Rupture Currents Technology Development Vehicle Amophous Silicon Antifuse Rupture ONO Antifuse

  7. Substrate -Silicon AntifuseF/A Using Liquid Crystal

  8. ONO Antifuse Breakdown - FA Mag = 5X Mag = 20X Mag = 100X

  9. Heavy Ion Damage andFailure Analysis M2M Antifuse Device ONO Antifuse Device

  10. Antifuse Failure Thresholds Two processes were used for this 3.3 V device Process 1 failed immediately @ 3.3 VDC Process 2 didn't fail @ 4.0 VDC

  11. Antifuse Rupture IonEnergy Dependence

  12. Antifuse Improvements • Decrease Electric Field Strength • Thicker Antifuses (RH1020, RH1280) • Low Bias Voltage (L-M PROM) • Antifuse “Recipe” • (RT54SX16, RH54SX16, RT54SX32) • Minimize Bias Time • (UTMC PROM) • Reduce Sensitivity • Differential Measurements (UTMC PROM)

  13. Dielectric Antifuse Cross Sections Unhardened Hardened

  14. Antifuse Rupture

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