Figure 5 schematic of a parallel plate capacitively coupled plasma reactor
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MKS baratron system. Valves. To Pump. Stainless steel grounded upper electrode. Glass wall of the reactor. Ar. RF-Power supply. Plasma gas. Stainless steel lower electrode. Figure 5: Schematic of a parallel plate capacitively coupled plasma reactor. Acrylonitrile Plasma.

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Figure 5 schematic of a parallel plate capacitively coupled plasma reactor

MKS baratron system

Valves

To Pump

Stainless steel grounded upper electrode

Glass wall of the reactor

Ar

RF-Power supply

Plasma

gas

Stainless steel lower electrode

Figure 5: Schematic of a parallel plate capacitively coupled plasma reactor


Figure 6 scheme of the reaction for the generation of quaternary ammonium surfaces

Acrylonitrile Plasma

Acetonitrile Plasma

NaCNBH3

R-Br

X

+

NH2

N

Br

Ethylene Diamine Plasma

X = -NH2, -NH-, -N=

Figure 6: Scheme of the reaction for the generation of Quaternary Ammonium Surfaces


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