MKS baratron system. Valves. To Pump. Stainless steel grounded upper electrode. Glass wall of the reactor. Ar. RF-Power supply. Plasma gas. Stainless steel lower electrode. Figure 5: Schematic of a parallel plate capacitively coupled plasma reactor. Acrylonitrile Plasma.
Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.
Stainless steel grounded upper electrode
Glass wall of the reactor
Stainless steel lower electrode
Figure 5: Schematic of a parallel plate capacitively coupled plasma reactor
Ethylene Diamine Plasma
X = -NH2, -NH-, -N=
Figure 6: Scheme of the reaction for the generation of Quaternary Ammonium Surfaces