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Vacuum Pumps. Basics. vac·u·um noun 1. a space entirely devoid of matter.

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Presentation Transcript
basics
Basics
  • vac·u·um
    • noun 1. a space entirely devoid of matter.
    • 2. an enclosed space from which matter, especially air, has been partially removed so that the matter or gas remaining in the space exerts less pressure than the atmosphere ( opposed to plenum). (dictionary.com)
  • Exhaust pressure= atm generally
  • Base pressure = pressure pump gets down to
  • Compression ratio = exhaust/base= big number
  • Boyles Law P1V1=P2V2
history of vacuum pumps
History of vacuum pumps
  • Suction pumps go way back (Romans, Byzantine empire, etc)
  • Major improvements on the idea of vacuum made by Galileo, Evangeilist Torricelli, and Blaise Pascal
  • Otto von Guericke made first pump and famous for Magdeburg hemispheres experiment
types of vacuum pumps
Types of Vacuum pumps
  • Positive displacement pumps
    • Expand a cavity, seal, exhaust, repeat
  • Momentum transfer pumps (molecular pumps)
    • High speed liquids or blades to knock gasses around
  • Entrapment
    • Create solids or adsorbed gases (cryopumps)
roughing pumps
Roughing pumps
  • Pumps from atm pressure down to rough vacuum (0.1 Pa, 1X10-3torr)
  • Necessary because turbo pumps have trouble starting from atmospheric pressure
  • Usually Rotary Vane pumps
  • Can have oil or not
rotary vane pumps
Rotary vane pumps

Oil Sealed Rotary Pumps Understanding Gas Ballastwww2.avs.org/chapters/nccavs/pdf/Gas_Ballast_OilSealedPumps.pdf

rotary vane pumps1
Rotary vane pumps

Condensation of vapor in the gas mixture is a problem with these pumps. Solution Ballasting

Works by increasing the gas/vapor ratio (air is mostly gas)

As you might imagine this interferes with the final vacuum

types
Types
  • One stage or two stage
  • Belt Drive or direct drive

Slower 400-600 RPM

Bigger, Cheaper

Faster 1500 to 1725 RPM

Smaller, lighter

turbo molecular pumps
Turbo (molecular) pumps
  • Gas molecules interact with spinning blades and are preferentially forced downward
  • High vacuum (10-6 Pa) requires rotation of 20,000 to 90,000 revolutions per minute
  • Generally work between 10-3 and 10-7 Torr
  • Ineffective before gas is in “molecular flow”
turbo molecular pumps1
Turbo (molecular) pumps
  • Options:
    • Bearings: Ceramic (oil lubricated) Magnetic (supported w/out physical contact), also hybrid
    • Rotor options (Blade configuration)
    • Cooling (air or water)
pump care
Pump Care
  • Rough pumps shouldn’t need a lot of maintenance
    • If they do repair kits are available:
    • Minor kit includes all necessary seals (shaft seals, valves, o-rings, etc)
    • Major kit includes Minor Kit components plus vanes, springs, plugs, etc.
    • Seem to be available for most major brands and types
  • Turbopumps should need even less maintenance, bearings can wear out but must be replaced by manufacturer for balancing.

http://www.sisweb.com/vacuum/sis/iseries-maintkit.htm

pump specs
Pump specs

Spec sheet for an

Edwards A65209903

RV rotary vane pump

$3171

slide14

Rotary Vane:

Pump speed lower at low vacuum

Turbo pumps: opposite

Pump Speed

Pressure

useful fitting terminology
Useful fitting terminology
  • Flanges
    • Standard quick Release (QF, KF, NW, or DN)
      • Named based on internal diameter DN16KF is 16mm (16-50mm)
    • Large Quick releases (LF, LFB, MF or ISO)
      • Clamps or bolts (63-500mm)
    • Conflat (CF) used in ultra high vacuum settings, usually metal to metal seals
      • Sizing odd: Europe inner diamter in mm, NA outer diameter in inches
slide16

Sizes we will likely find.

www.vacuumresearchcorp.com/pdfs/valves/nwflanges06.pdf

pumps on the delta s
Pumps on the Delta S
  • Pumping system for Analyzer
    • Turbo molecular pump TPH 050
    • Vacuum pump E2 M1, 52
  • Differential Pumping system
    • Turbo molecular pump TPH 050
    • Turbo molecular pump TPH 240
    • Vorvakuumpumpe E2 M5, 50160 Hz
slide18

Turbo molecular pump TPH 050

Turbo molecular pump TPH 240

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