微區域電子繞射分析 ( Nano Beam Diffraction, NBD)

Nov 02, 2014

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微區域電子繞射分析 ( Nano Beam Diffraction, NBD) 從非常小的角度射入極細小的電子束 (<5 nm) 來做繞射圖樣，藉由這樣的特性可以進行 nm 等級的化學和晶體結構分析。. TEM 常用來觀察有無 dislocation. TEM 做橫切面展示製程結構. Poly plug(poly via) 的橫切面觀察. W plug(contact) 的橫切面觀察.

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微區域電子繞射分析 ( Nano Beam Diffraction, NBD)

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微區域電子繞射分析(Nano Beam Diffraction, NBD) 從非常小的角度射入極細小的電子束 (<5nm) 來做繞射圖樣，藉由這樣的特性可以進行nm等級的化學和晶體結構分析。
TEM 常用來觀察有無dislocation TEM做橫切面展示製程結構 Poly plug(poly via)的橫切面觀察 Wplug(contact)的橫切面觀察

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