真空晨会报告
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真空晨会报告. 2009-06-26. 主要工作. He GDC 04:00-05:30 2 A , 0.5 Pa. 目前真空系统状态. 内真空: 2 台主分子泵 +3CP ; 外真空: 2 台分子泵; 低杂波: 1 套分子泵机组; 目前烘烤: 感应烘烤: 0 内衬烘烤: 10 A 管道烘烤: 100 V. 装置各处真空度演变. 内真空 质谱.

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真空晨会报告

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5820768

真空晨会报告

2009-06-26


5820768

主要工作

  • He GDC

    • 04:00-05:30

    • 2 A,0.5 Pa


5820768

目前真空系统状态

  • 内真空:2台主分子泵+3CP;

  • 外真空:2台分子泵;

  • 低杂波:1套分子泵机组;

  • 目前烘烤:

    • 感应烘烤:0

    • 内衬烘烤:10 A

    • 管道烘烤:100 V


5820768

装置各处真空度演变


5820768

内真空 质谱


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