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Modeled Effective Dielectric Constants. Bulk Dielectric. 50nm SiC. k1. Cu. Cu. 0.26um. 0.14um. 50nm SiC. Bulk Dielectric. If bulk dielectric = 2.6 then k eff = 2.94 If bulk dielectric = 2.2 then k eff = 2.57

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Modeled effective dielectric constants
Modeled Effective Dielectric Constants

Bulk Dielectric

50nm SiC

k1

Cu

Cu

0.26um

0.14um

50nm SiC

Bulk Dielectric

If bulk dielectric = 2.6 then keff = 2.94

If bulk dielectric = 2.2 then keff = 2.57

If bulk dielectric = 1.5 then keff = 1.96

If bulk dielectric = 1.0 (Air) then keff = 1.5

Raphel FEM provided by M-H Tsai and B. Havemann


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