Evaporator control system
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Evaporator Control System. An Overview by Hans De Jong. Manual. Cryo Regen. Automated Process. Full Pumpdown. Full Vent. Abort Idle. Load Lock Pumpdown. Load Lock Vent. State Control Screens. Manual Operation. Pumpdown Graph. Features. Production / Lot Reporting

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Evaporator Control System

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Evaporator control system

Evaporator Control System

An Overview

by

Hans De Jong


Automated process

Manual

Cryo

Regen

Automated Process

Full

Pumpdown

Full

Vent

Abort

Idle

Load Lock

Pumpdown

Load Lock

Vent


State control screens

State Control Screens


Manual operation

Manual Operation


Pumpdown graph

Pumpdown Graph


Features

Features

  • Production / Lot Reporting

  • Boule Consumption

  • Deposition Process Record

  • Process alarming

  • RGA integration

  • Password Controlled Features


Deposition graph

Deposition Graph


Advantages

Advantages

  • Automated Operation

  • Improved throughput

  • Open system architecture, includes source code

  • Industry Standard MS Access Database

  • Ethernet Networking


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