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Evaporator Control System. An Overview by Hans De Jong. Manual. Cryo Regen. Automated Process. Full Pumpdown. Full Vent. Abort Idle. Load Lock Pumpdown. Load Lock Vent. State Control Screens. Manual Operation. Pumpdown Graph. Features. Production / Lot Reporting

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Presentation Transcript
Evaporator control system

Evaporator Control System

An Overview

by

Hans De Jong


Automated process

Manual

Cryo

Regen

Automated Process

Full

Pumpdown

Full

Vent

Abort

Idle

Load Lock

Pumpdown

Load Lock

Vent



Manual operation
Manual Operation



Features
Features

  • Production / Lot Reporting

  • Boule Consumption

  • Deposition Process Record

  • Process alarming

  • RGA integration

  • Password Controlled Features



Advantages
Advantages

  • Automated Operation

  • Improved throughput

  • Open system architecture, includes source code

  • Industry Standard MS Access Database

  • Ethernet Networking


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