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SEMICONDUCTOR PHYSICS & DEVICES. 半導體元件物理. 參考書籍:. S.M.Sze ( 施敏 ) ……………… 教科書 SEMICONDUCTOR DEVICES Physics and Technology 2 nd Edition Donald A. Neamen SEMICONDUCTOR PHYSICS & DEVICES BASIC PRINCIPLES 2 nd Edition Hong Xiao Introduction to Semiconductor Manufacturing Technology

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Semiconductor physics devices
SEMICONDUCTOR PHYSICS & DEVICES

半導體元件物理


Semiconductor physics devices
參考書籍:

  • S.M.Sze (施敏) ………………教科書

    SEMICONDUCTOR DEVICES Physics and Technology

    2nd Edition

  • Donald A. Neamen

    SEMICONDUCTOR PHYSICS & DEVICES BASIC PRINCIPLES

    2nd Edition

  • Hong Xiao

    Introduction to Semiconductor Manufacturing Technology

  • 莊達人編著

    VLSI製造技術 (五版修訂)


Semiconductor physics devices
評分標準

  • 期中考,期末考各佔 30%

  • 作業:20%

  • 報告:20%


Semiconductor physics devices
課程大綱

  • 第一章 簡介

  • 第二章 熱平衡時的能帶及載子濃度

  • 第三章 載子傳輸現象

  • 第四章 正 – 負接面

  • 第六章 金氧半場效電晶體及其相關元件

  • 第七章 金半場效電晶體及其相關元件

  • 第十章 晶體成長及磊晶

  • 第十一章 薄膜形成

  • 第十二章 微影與蝕刻

  • 第十三章 雜質摻雜

  • 第十四章 積體元件


Chap1 introduction
Chap1 Introduction

  • 1.1 Semiconductor Devices(半導體元件)

全球國民生產總值

GWP的20%

1998年

電子工業的20%


Semiconductor physics devices
元件的基礎結構

pn接面

金屬-半導體界面

金屬-氧化層-半導體結構

異質半導體接面


Semiconductor physics devices
金屬半導體界面-整流型接觸、歐姆接觸(最早,1874年)

應用:MESFET(金屬半導體電晶體)

閘極—整流型接觸

汲極及源極---歐姆接觸

  • pn接面 (半導體元件物理的基礎)

兩個pn接面可形成雙載子電晶體(BJT)

三個pn接面可形成閘流體(thyristor)(一種切換元件switching device)


Semiconductor physics devices
異質半導體界面

可製作高速元件及光電元件

例:GaAs和AlAs可形成異質接面

金氧半結構—即金屬氧化層界面+氧化層半導體界面

應用:

金氧半結構形成閘極

兩個pn接面形成汲極與源極

形成MOSFET


1 1 2
1.1.2 主要的半導體元件

(發光二極體)

太陽電池

穿隧二極體

雷射

轉移電子二極體

衝渡二極體


Semiconductor physics devices
主要的半導體元件(續)

非揮發性半導體記憶體

電荷耦合元件

共振穿隧二極體

調變摻雜場效電晶體

室溫單電子記憶胞

兩端點元件



Semiconductor physics devices
第一個金氧半場效電晶體

Gate length: 25m

Gate oxide: 100nm


Semiconductor physics devices
NVSM(非揮發性半導體記憶體):電源關掉後,仍保有所儲存的訊息

浮停閘:可半永久貯存電荷

將浮停閘縮至極小,只可貯存一個電子





Semiconductor physics devices

Figure 1.8.Exponential increase of dynamic random access memory density versus year based on the Semiconductor Industry Association (SIA) roadmap.49


Figure 1 9 exponential increase of microprocessor computational power versus year
Figure 1.9. Exponential increase of microprocessor computational power versus year.


Figure 1 10 growth curves for different technology drivers 50
Figure 1.10.Growth curves for different technology drivers.50


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