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Meso Machining. Norman Salmon Engineering Program Manager Lawrence Berkeley National Lab [email protected] silicon µ- machining. miniature machining. meso machining. Meso-scale machining : 10 µm ~ 1m m

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Meso machining

Meso Machining

Norman Salmon

Engineering Program Manager

Lawrence Berkeley National Lab

[email protected]


silicon µ-machining

miniature machining

meso machining

  • Meso-scale machining: 10 µm ~ 1mm

    bridging the gap between silicon based MEMS and conventional miniature machining.

10-3 10-4 10-510-6 [m]

Critical dimensions


Micro milling drilling and turning
Micro Milling, Drilling and Turning

Micro Stepper Motor Laminates - Produced Using 100 Micron Diameter Rotary Cutting Tools - Tech Transfer Grant for Empire Magnetics FY2002

100 Micron Diameter Micro Electrodes Produced for Alexander Zholents 2002 AFRD LDRD

Holes as small as 40 Microns can be drilled in Stainless Steel - Shown is a 70 Micron Drill compared with a Human Hair


Micro rotor

Micro Engine Components

1mm

Micro Rotor

Micro Turbine

1mm

1mm



Meso machining examples
Meso-Machining Examples

FIB

Milling

37µm cutting tool

10µm gears on silicon

25µm channel on diamond

39µm channel on graphite


  • Micro Tooling

    • tooling design

    • tooling application

    • materials

      • Diamond tools cut by FIB

      • New workpiece materials

    • analysis of cutting performance

      • Force sensing (MEMS)

      • Acoustic emissions

10 micron End Mill

25 micron End Mill


Long term vision
Long Term Vision

Micro Turning

Micro EDM

Micro Milling

Laser Cutting and Welding

LBL - MESO Machining Lab

AFM Nano- Machining

LIGA

Micro Molding & Casting

FIB

Micro Wire EDM



Nano manipulator for the molecular foundry

120mm with FIB

y

z

x

Nano-Manipulator for the Molecular Foundry


Micro assembly station
Micro Assembly Station with FIB

  • MEMS Grippers

  • Gripper Changer

  • Nanometer resolution

  • Haptic Feedback?


Meso machine tool with FIB

with in situ metrology

  • High Speed 170K RPM Hydrostatic Spindle

  • Sub-Micron Accuracy

  • Integrated CMM Probing, Laser, and Capacitance Inspection


Objectives
Objectives with FIB

  • Develop Leading Technology Program in Meso Machining, Assembly, and Metrology

  • Develop Partnerships and Collaborative efforts that support and compliment our Technology


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