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P P+ T R A I N I N G P R E S E N T. Robin Wu. How PP+ Works?. ( Secondary Arm). ( Primary Arm). Wafer Handler Processing Steps. Wafer Handler Processing Steps. 10. When implant complete, the primary arm will go to the platen and remove the wafer. Wafer Handler Processing Steps.

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PP+ TRAINING PRESENT

Robin Wu


How PP+ Works?

(Secondary Arm)

(Primary Arm)

VSEA Confidential


Wafer Handler Processing Steps

VSEA Confidential


Wafer Handler Processing Steps

10.When implant complete, the primary arm will go to the platen and remove the wafer.

VSEA Confidential


Wafer Handler Processing Steps

15. The elevator goes to nest one slot. And the process repeats from step 1.

VSEA Confidential


Software Different

VSEA Confidential


  • ECO’s and Options Settings

VSEA Confidential


Initialization Screen

VSEA Confidential


Manual Screen

VSEA Confidential


Dual Arm calibrations - Level

  • Lower Handler

VSEA Confidential


Dual Arm calibrations - Level

  • Upper Handler

VSEA Confidential


Dual Arm Controller Install

VSEA Confidential


Dual Arm Controller Offset

Upper

Lower

E15000206

Lower

Upper

VSEA Confidential


Controller Settings - Tuning Procedure

VSEA Confidential


Controller Settings - Zero Off set

R29

  • 1.Handler Stop

  • 2.Measure TP1 and TP3, adjust R29 to 0.000 +-0.001VDC.

  • 3.Measure J4-1 & J4-2, adjust OFFSET on PCB’s amplifier to 0.000 +- 0.020 VDC.

  • Repeat step 2 & 3 until both measurement close to 0 VDC.

J4-1 & J4-2

TP1 & TP3

VSEA Confidential


Upper Handler Install

VSEA Confidential


Upper Handler Calibration- Idle

  • [Stop] and move the Upper Handler to the hard stop.

  • Key in the revised number.

VSEA Confidential


Upper Handler Calibration- Home

VSEA Confidential


Upper Handler Calibration- Platen

VSEA Confidential


Orienter calibration

VSEA Confidential


Orienter Calibration Low Position

VSEA Confidential


Orienter Calibration High Position

VSEA Confidential


Orienter Calibration High Position

VSEA Confidential


  • Reflective Wafer Sensor

VSEA Confidential


Reflective Wafer Sensor Sensitivity Adjustment

Operation mode selector switch

Sensitivity adjustment trimmer

  • The red LED indicate the sensor output is on

  • The green LED indicate the sensor operation is stable

VSEA Confidential


  • 1. Set the Mode Selector Switch to the “L” position.

  • 2. Move the reflective tape away from to the sensors view.

  • 3. Rotate the sensor fully CCW and then rotate the trimmer CW until the red LED illuminates.

“A” Position

Fully CCW then CW to illuminate the “Red” LED.

VSEA Confidential


  • 4. Move the reflective tape under the sensor and verify the green and red LEDs are on .

  • 5. Tune the trimmer CCW from “A” until the green LED off.

“B” Position

  • 6. Adjust the trimmer to the center of “A” & “B”

VSEA Confidential


Cycle Test (VAC)

VSEA Confidential


Implant Monitor Screen

VSEA Confidential


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