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P P+ T R A I N I N G P R E S E N T. Robin Wu. How PP+ Works?. ( Secondary Arm). ( Primary Arm). Wafer Handler Processing Steps. Wafer Handler Processing Steps. 10. When implant complete, the primary arm will go to the platen and remove the wafer. Wafer Handler Processing Steps.

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P p t r a i n i n g p r e s e n t

PP+ TRAINING PRESENT

Robin Wu


P p t r a i n i n g p r e s e n t

How PP+ Works?

(Secondary Arm)

(Primary Arm)

VSEA Confidential


P p t r a i n i n g p r e s e n t

Wafer Handler Processing Steps

VSEA Confidential


P p t r a i n i n g p r e s e n t

Wafer Handler Processing Steps

10.When implant complete, the primary arm will go to the platen and remove the wafer.

VSEA Confidential


P p t r a i n i n g p r e s e n t

Wafer Handler Processing Steps

15. The elevator goes to nest one slot. And the process repeats from step 1.

VSEA Confidential


P p t r a i n i n g p r e s e n t

Software Different

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P p t r a i n i n g p r e s e n t

  • ECO’s and Options Settings

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P p t r a i n i n g p r e s e n t

Initialization Screen

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P p t r a i n i n g p r e s e n t

Manual Screen

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P p t r a i n i n g p r e s e n t

Dual Arm calibrations - Level

  • Lower Handler

VSEA Confidential


P p t r a i n i n g p r e s e n t

Dual Arm calibrations - Level

  • Upper Handler

VSEA Confidential


P p t r a i n i n g p r e s e n t

Dual Arm Controller Install

VSEA Confidential


P p t r a i n i n g p r e s e n t

Dual Arm Controller Offset

Upper

Lower

E15000206

Lower

Upper

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P p t r a i n i n g p r e s e n t

Controller Settings - Tuning Procedure

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P p t r a i n i n g p r e s e n t

Controller Settings - Zero Off set

R29

  • 1.Handler Stop

  • 2.Measure TP1 and TP3, adjust R29 to 0.000 +-0.001VDC.

  • 3.Measure J4-1 & J4-2, adjust OFFSET on PCB’s amplifier to 0.000 +- 0.020 VDC.

  • Repeat step 2 & 3 until both measurement close to 0 VDC.

J4-1 & J4-2

TP1 & TP3

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Upper handler install

Upper Handler Install

VSEA Confidential


P p t r a i n i n g p r e s e n t

Upper Handler Calibration- Idle

  • [Stop] and move the Upper Handler to the hard stop.

  • Key in the revised number.

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P p t r a i n i n g p r e s e n t

Upper Handler Calibration- Home

VSEA Confidential


P p t r a i n i n g p r e s e n t

Upper Handler Calibration- Platen

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P p t r a i n i n g p r e s e n t

Orienter calibration

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P p t r a i n i n g p r e s e n t

Orienter Calibration Low Position

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P p t r a i n i n g p r e s e n t

Orienter Calibration High Position

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P p t r a i n i n g p r e s e n t

Orienter Calibration High Position

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P p t r a i n i n g p r e s e n t

  • Reflective Wafer Sensor

VSEA Confidential


P p t r a i n i n g p r e s e n t

Reflective Wafer Sensor Sensitivity Adjustment

Operation mode selector switch

Sensitivity adjustment trimmer

  • The red LED indicate the sensor output is on

  • The green LED indicate the sensor operation is stable

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P p t r a i n i n g p r e s e n t

  • 1. Set the Mode Selector Switch to the “L” position.

  • 2. Move the reflective tape away from to the sensors view.

  • 3. Rotate the sensor fully CCW and then rotate the trimmer CW until the red LED illuminates.

“A” Position

Fully CCW then CW to illuminate the “Red” LED.

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P p t r a i n i n g p r e s e n t

  • 4. Move the reflective tape under the sensor and verify the green and red LEDs are on .

  • 5. Tune the trimmer CCW from “A” until the green LED off.

“B” Position

  • 6. Adjust the trimmer to the center of “A” & “B”

VSEA Confidential


P p t r a i n i n g p r e s e n t

Cycle Test (VAC)

VSEA Confidential


P p t r a i n i n g p r e s e n t

Implant Monitor Screen

VSEA Confidential


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