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Metrology and Instrumentation Challenges for Nanomanufacturing and Product Realization of Integrated Systems. Convergence of Scales-Signals-Domains for Integrated Systems…. Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A.

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Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A.

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Ajay p malshe ph d mechanical engineering university of arkansas fayetteville ar u s a

Metrology and Instrumentation Challenges for Nanomanufacturing and Product Realization of Integrated Systems

Convergence of Scales-Signals-Domains for Integrated Systems…

Ajay P. Malshe, Ph.D.

Mechanical Engineering

University of Arkansas, Fayetteville, AR, U.S.A.

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>


Ajay p malshe ph d mechanical engineering university of arkansas fayetteville ar u s a

Nanotechnology for Mechanical Engineers

Glimpses of Work in Malshe’s Materials and Manufacturing Research Group:

  • Examples of integration of nano-micro-bio for

  • nanomanufacturing of integrated systems,

  • nano mechanical machining system on chip (status- fabrication complete and is being released);

  • femto second, 380 fs, written periodic feature on diamond, smallest feature is about 50 nm;

  • E. Coli Cellular actuation using 30 nm flagilar motors (see attached movie);

  • 3D assembled cBN 0-2 um sized particles in TiN matrix (technology used to spin-off NanoMech);

  • nanomechanical silicon beam for NEMS devices;

  • nano mechanical patterning of GaAs surface for growing array of quantum structures 1.5μm scan of sample after a 5x5 grid of 25 (30 nm) 40μN indents spaced approximately 200nm apart.

(a)

(b)

(c)

(c)

50nm

NanoMEEG

(111

)

_____

15nm

_

cBN-TiN

composite

coating

(d)

(d)

(d)

(f)

(e)

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>


Ajay p malshe ph d mechanical engineering university of arkansas fayetteville ar u s a

Nano-Manufacturing new products or adding value to current products to improve quality of life throughintegration of nano materials.

GRAND challenge: “Retaining functional signature of the NANO materials, devices, and components during nanomanufacturing and application.”

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>


Typical needs of manufacturing

Typical needs of manufacturing:

  • Dimensional Repeatability

  • Functional Reproducibility

  • Behavioral Reliability

  • Low cost

  • Known standards

  • Evolutionary production

  • Environmentally benign

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>


Example 1 nano machining time 90sec

Example 1: Nano Machining (Time 90sec)

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>


Example 2 nano machining time 120sec

Example 2: Nano Machining Time (120sec)

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>


Ajay p malshe ph d mechanical engineering university of arkansas fayetteville ar u s a

  • Key challenges for metrology and instrumentation…

  • Nano materials- functional and dimensional classification

  • Tools and systems for reproducible nano manipulation* and post-synthesis processing (* self and/or intentional)- tolerance, materials and interfacial analysis

  • Integration and packaging- interconnects across the scale and functional boundaries

  • Addressing component reliability and system durability- knownstandards

  • Addressing “application specific” scientific and engineering designing-to-processing issues- proven design , modeling and scale up tools

Trend of Progress in the Field of Micro and Nano Systems

Micro Electro Mechanical Systems (MEMS)

Quantum structure, Laser Dots

Integrated Circuits

ICs

DNA Computing

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>


Acknowledgements

ACKNOWLEDGEMENTS

DMII- National Science Foundation (NSF)

EPSCoR- National Science Foundation (NSF)

ECS- National Science Foundation (NSF)

Air Force Office of Scientific Research (AFOSR)

Students and post-doctoral fellows, and colleagues.

Collaborators from SNL, LBNL, UNL and OSU, Valenite, Coherent and Texas A&M.

Fayetteville and Springdale high schools.

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>


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