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Defects and Disorders in Semiconductors. Jermell Powell ECE 423 11/15/06. Defect types. Point defects Line defects Area defects Cluster defects. Point defects. Types Frenkel defect pair. Line defects. Example. Wide defects. Area defect Epitaxial mound Cluster defect Dust particle

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defects and disorders in semiconductors

Defects and Disorders in Semiconductors

Jermell Powell

ECE 423

11/15/06

defect types
Defect types
  • Point defects
  • Line defects
  • Area defects
  • Cluster defects
point defects
Point defects
  • Types
  • Frenkel defect pair
wide defects
Wide defects
  • Area defect
    • Epitaxial mound
  • Cluster defect
    • Dust particle
    • Mask scratch
defect density
Defect density
  • d(r) = d{1 + 2.5 exp [0.34 X 19(1 - r/R)]}
causes of defects
Causes of defects
  • Semiconductor doping
  • Czochralski method
advanced defects
Advanced defects
  • Antisite
    • Nonstoichiometric
  • Void defects
divacancy
Divacancy
  • Cause
  • Effect
    • V-V + Isi -> V-V + Isi
    • V-V + Isi -> V
    • V-V + 2Isi -> V-V + 2Isi
    • V-V + 2Isi -> V + Isi
    • V-V + 2Isi -> 0
results
Results
  • Positive
    • Oxygen in Silicon
      • Lifetimes
      • Diffusion lengths
      • Mobilities
      • Solar cells, IC
slide11
ZnTe and CdTe
    • Chlorine doping
    • Copper doping
  • GaAs, Arsenic heavy
slide12
Detrimental
    • Categories of Inoperability
    • Oxygen in Silicon
    • Dielectric breakdown
questions
Questions?
  • Thank you
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