Defects and disorders in semiconductors
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Defects and Disorders in Semiconductors. Jermell Powell ECE 423 11/15/06. Defect types. Point defects Line defects Area defects Cluster defects. Point defects. Types Frenkel defect pair. Line defects. Example. Wide defects. Area defect Epitaxial mound Cluster defect Dust particle

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Defects and Disorders in Semiconductors

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Defects and Disorders in Semiconductors

Jermell Powell

ECE 423

11/15/06


Defect types

  • Point defects

  • Line defects

  • Area defects

  • Cluster defects


Point defects

  • Types

  • Frenkel defect pair


Line defects

  • Example


Wide defects

  • Area defect

    • Epitaxial mound

  • Cluster defect

    • Dust particle

    • Mask scratch


Defect density

  • d(r) = d{1 + 2.5 exp [0.34 X 19(1 - r/R)]}


Causes of defects

  • Semiconductor doping

  • Czochralski method


Advanced defects

  • Antisite

    • Nonstoichiometric

  • Void defects


Divacancy

  • Cause

  • Effect

    • V-V + Isi -> V-V + Isi

    • V-V + Isi -> V

    • V-V + 2Isi -> V-V + 2Isi

    • V-V + 2Isi -> V + Isi

    • V-V + 2Isi -> 0


Results

  • Positive

    • Oxygen in Silicon

      • Lifetimes

      • Diffusion lengths

      • Mobilities

      • Solar cells, IC


  • ZnTe and CdTe

    • Chlorine doping

    • Copper doping

  • GaAs, Arsenic heavy


  • Detrimental

    • Categories of Inoperability

    • Oxygen in Silicon

    • Dielectric breakdown


Questions?

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