Science Saturday --- October 1, 2005
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Science Saturday --- October 1, 2005 IBM chip UMass Logo TI mirror array Nanotechnology Exciting new science and technology for the 21st century Nanotechnology Is a broad, interdisciplinary topic involving physics, chemistry, biology and engineering

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Nanotechnology l.jpg

IBM chip

UMass Logo

TI mirror array

Nanotechnology

Exciting new science and technology

for the 21st century


Nanotechnology3 l.jpg

Nanotechnology

Is a broad, interdisciplinary topic involving physics, chemistry, biology and engineering

It has potential impact in electronics, medicine, materials, and a wide variety of application areas.


How small are nanostructures l.jpg

Single Hair

Width = 0.1 mm

How small are nanostructures?

= 100 micrometers

= 100,000 nanometers !

1 nanometer = one billionth (10-9) meter


Smaller still l.jpg

DNA

6,000 nanometers

Red blood cell

3 nanometers

Smaller still

Hair

.


How do we make nanostructures l.jpg
How do we make nanostructures?

How do we see nanostructures?


First how do we make nanostructures l.jpg
First,how do we make nanostructures?

• Lithography

• Self-assembly


Lithography l.jpg
Lithography

Mark

Tuominen

Mark

Tuominen


Making a microscopic mask l.jpg

Electron Beam

Polymer film

Silicon crystal

Making a microscopic mask

Nanoscopic Mask !


Lithography10 l.jpg
Lithography

Patterned

Several

Times

IBM

Copper

Wiring

On a

Computer

Chip


Slide11 l.jpg

~10 nm

SELF ASSEMBLY

Block “B”

Diblock

Copolymer

Block “A”

PS

PMMA

Scale set by molecular size

Ordered Phases

10% A

30% A

50% A

70% A

90% A


Slide12 l.jpg

BASIC NANOPOROUS TEMPLATE

PROCESS APPLICATIONS

Deposition

Template

Etching

Mask

Remove polymer

block within cylinders

(UV or ebeam exposure;

Acetic acid rinse)

Nanoporous

Membrane

“A versatile, self-assembling, nanoscale lithographic system”


Sem image of nanoporous polymer template l.jpg
SEM IMAGE OF NANOPOROUS POLYMER TEMPLATE

PS/PMMA

MW = 42,000

Array Period = 24 nm

Pore Diameter = 14 nm


Slide14 l.jpg

Nanowires

Template Transfer

Copolymer

Template

Separations

& Sensors

Patterned

Media

Glass Pillars

FUNCTIONAL NANOARRAYS

NIRT

UMass Amherst

Devices


Slide15 l.jpg

200 nm

100 nm

20 nm

unfilled

polymer

template

electrodeposited

cobalt

nanowires

gold

silicon

NANOWIRE ARRAYS using ELECTRODEPOSITION

1 0 1 1 0

cobalt

nanowires

• ULTRA-HIGH DENSITY MAGNETIC

DATA STORAGE

1.2 trillion wires/in2


Slide16 l.jpg

LATERALLY-PATTERNED MEDIA

vertically-oriented

diblock copolymer film

NO HOLES

“patterned” nanoporous

polymer template

unexposed region

of copolymer film

HOLES

“patterned” nanowire

array


How do we see nanostructures l.jpg
How do we see nanostructures?

• A light microscope?

• An electron microscope!

• A scanning probe microscope!


Television set l.jpg

TV screen

eye

electron beam

electron

source

Light !

Television Set


Electron microscope l.jpg

Electron

Beam

DETECTOR

SAMPLE

Electron Microscope


Scanning probe microscope l.jpg

Surface

Scanning probe microscope

Vibrating Cantilever





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