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製造執行系統 Manufacturing Execution System : MES. 產業 Operation 產業 e 化架構 Manufacturing Sequence Flow Why MES (factory operation point of view) Why MES (Industry point of view) MES 定義 MES 功能 MES 架構 MES 技術 MES 與其它 e 化系統的整合. Outline. 產業活動. 策略規劃. 行政支援與管理. 行 銷. 品 質 工 程. 工程與研發.

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製造執行系統 Manufacturing Execution System : MES

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Manufacturing execution system mes

製造執行系統

Manufacturing Execution System : MES


Outline

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

產業活動

策略規劃

行政支援與管理

行 銷

工程與研發

生產規劃

廠區控制

(生產)工廠自動化

配 送

維修與服務


Outline1

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

產業電子化活動


Manufacturing execution system mes

電子化應用系統 (I)


Manufacturing execution system mes

電子化應用系統 (II)


Manufacturing execution system mes

電子化應用系統 (III)

基礎發展環境

企業智財BIC /

知識管理KM

供應面

需求面

顧客關係管理

CRM

企業資源規劃

ERP

供應鏈管理

SCM

工程資料管理

PDM

製造執行系統

MES

電子商務平台/網站應用程式伺服軟體/應用程式伺服軟體

EC Platform / WEB Application Server/ Application Server


Outline2

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

What is IC industry


Manufacturing execution system mes

IC Manufacturing Process (I)


Manufacturing execution system mes

IC Manufacturing Process (II)

說明

圖釋

流程

薄膜

薄膜(Thin_film)

1.化學氣相沉積(CVD)

2.金屬濺鍍(PVD)

3.擴散(Diffusion)

Wafer

FILM

Wafer

FILM

Wafer

黃光(PHOTO)

1.光罩(MASK)

2.光阻(Coater)

3.曝光(Exposure)

4.顯影(Development)

黃光

光罩

光阻

FILM

Wafer

光阻

FILM

Wafer

蝕刻(ETCH)

1.濕蝕刻(Wet-ETCH)

2.乾蝕刻(DRY-ETCH)

植入

蝕刻

光阻去除(PR remove)

將光阻去除後就是我們所需的

圖形(PATTERN)

光阻去除


Manufacturing execution system mes

AlCu 12KA

PESiN 6KA

4KA

PEOX 4KA

SiN 750A

M8 (Cu)

M8 (9K)

USG 7.5KA (9.9KA)

SiN 300A

(IMD7=6.5KA)

for V7=0.36*0.36

1200A

USG 7.2KA

Via7

SiN 500A

M7 (3.5K)

FSG 2.3KA (4.2KA)

SiN 300A

SiN 500A

M3 (Cu)

M3 (3.5K)

FSG 2.3KA (4.2KA)

SiN 300A

900A

FSG 4.9KA

Via2

SiN 500A

M2 (Cu)

FSG 2.3KA (4.2KA)

M2 (3.5K)

SiN 300A

900A

FSG 4.9KA

(IMD1~6=4.5KA)

Via1

SiN 500A

M1 (Cu)

FSG 1.7KA (2.9KA)

M1 (2.6K)

SiN 300A

600A

HDP PSG

5.5KA

W-Plug

SiN 400A

STI

IC Manufacturing Process (III)


Manufacturing execution system mes

IC Manufacturing Process (IV)


Outline3

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

整合4M (Man, Machine, Material and Method) 以最短的時間及最少的成本產出最好品質的產品.

Cost

Cycle Time

Yield

Productivity

IC Manufacturing Process Management (1)


Manufacturing execution system mes

There are 30-50 basic routes for production FAB

There are 500-1000 product routes in one FAB

There are 3000 tools monitoring routes in one FAB

There are 500-1000 production tools in one FAB

There are 1K wafers start in one FAB

There are daily 80K track-in-out in one FAB

There are daily 15M transactions in one FAB

There are average daily 600 people operation in one FAB

There are daily 1-2K tool monitoring operation in one FAB

There are average 10K control/dummy wafers in one FAB

There are average 14K SPC charts used in one FAB

There are 20K real-time tool monitoring charts in one FAB

There are average 4000 tool alarms in one FAB

There are average 2K final wafer test data files generated

IC Manufacturing Process Management (2)


Manufacturing execution system mes

Why we need MES ?

More technologies

More tighten process control

More cost for any production lost

More demand for cycle time management

More automation operation is required

IC Manufacturing Process Management (3)

Material

Tool

Human

Quality

Technology

Knowledge


Manufacturing execution system mes

IC Manufacturing Process Management (4)


Outline4

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

IC Manufacturing Process Management (4)

Quick Response to

Business Change

Cycle


Manufacturing execution system mes

Semiconductor challenge in ITRS

Complexity Management

  • Rapid changes to business needs and demands.

  • Increasing process and product complexity.

  • Larger wafers and carriers.

  • Increased reliance on factory information and control systems.

    Factory and Process Optimization

  • Increased customer expectation to meet on time deliver.

  • Increased urgency for improved factory effectiveness.

  • High factory yield at start-up.

  • Reduce wafer and product costs.

    Extendibility, Flexibility and Scalability

  • Reuse of factory information and control systems.

  • Factory systems that support rapid process and technology changes.

[Source : ITRS 2003]


Manufacturing execution system mes

Improvement for Semiconductor challenge in ITRS

  • Cost per unit area of silicon—Manufacturing cost per unit area of silicon is a easure of productivity. The capital cost of a factory has grown significantly each year, from $50M US in the 1980s to over $3B US in 2003.2

  • Time to ramp a factory to high-volume production with high yields—Decreasing time to ramp a factory to high volume production and high yield has more economic impact than reducing operating costs. New factories must be built and ramped to mature production at a much faster rate as reflected in Tables 86 and 89. Existing factories must be upgraded faster without impacting ongoing production.

  • Increasing flexibility to accommodate technology and business changes—Technology advances and the globalization of manufacturing enterprises have led to a decrease in cost for electronic components. This enables new markets to open and creates the need to increase the pace of new product introduction. The flexibility to accommodate these changes in business expectations must improve without significant cost impacts.


Manufacturing execution system mes

KPI in ITRS – Factory Operation

[Source : ITRS 2003]


Manufacturing execution system mes

KPI in ITRS – Production Equipment

[Source : ITRS 2003]


Manufacturing execution system mes

KPI in ITRS – FICS

[Source : ITRS 2003]


Manufacturing execution system mes

KPI in ITRS – Facility

[Source : ITRS 2003]


Manufacturing execution system mes

KPI in ITRS – Metrology

[Source : ITRS 2003]


Manufacturing execution system mes

KPI in ITRS – Process Integration


Manufacturing execution system mes

KPI in ITRS – Yield Learning

[Source : ITRS 2003]


Manufacturing execution system mes

KPI in ITRS – Yield Enhancement

[Source : ITRS 2003]


Outline5

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

MES


Manufacturing execution system mes

manufacturing execution system: Software systems designed to integrate with enterprise systems to enhance the shop floor control functionality that is usually inadequate in ERP systems. MES provides for shop floor scheduling, production and labor reporting, integration with computerized manufacturing systems such as automatic data collection and computerized machinery.

MES is a term used to describe systems that track and manage all aspects of a job in real time while it is in the execution phase or in process It may include resource management, capacity scheduling, maintenance management, statistical quality control, laboratory information management, process management, data collection, plant wide document management and process optimisation. MES is focused on the short term and may link to ERP/MRPII software for higher level planning and control tasks.

Enables network managers to gather control data from the shop floor into coherent and relevant information. Key functions include data acquisition, dispatching, document control, scheduling, resource allocation, product history, operational analysis, and management of labor, maintenance, processes, and quality.

製造執行系統是一從接到訂單從事生產開始到產品完成,傳送產品在生產線上生產的即時資訊 給使用者監看。它將工廠生產的即時和準確資料回應於報表或其他方式上,呈現的結果會隨著 現在情況的不同迅速改變,其目的在於降低沒有附加價值的活動,如機台當機等,並提高有效 的生產。MES可以將讓產品準時交貨,提高庫存週轉率,增加總生產盈餘,和加速資金的流動, 當生產活動發生緊急事件時,他還提供現場緊急狀態的資訊,並可經由兩條以上的管道通知使用者

MES definition


Manufacturing execution system mes

MES History

1960年代的晚期到1970年代初期   

從會計系統衍生出物料需求規劃(MRP),此系統用來協助工廠對物料需求做好規劃。

1970年的晚期到1980年代初期

電腦對資料的處理能力越來越強,MRP則衍生為MRPII,此MRPII則包含了現場報表系統(Shop Floor Reporting System)、採購系統(Purchasing System)與其他相關功能。在這段期間,許多公司開始認為他們需要其他系統去管理更多事物,因MRPII不強調預測及需求分配上的管理,對現場的管理功能也較缺乏;為了改善這些缺失,預測、配銷資源規劃(Distributed Resource Planning;DRP)、MES(強調WIP追蹤)與單一功能的系統(如品管功能)等相關系統就應運而生,但這些系統卻未完全整合,所以系統間資料的交換非常困難。

1980年的晚期至1990年初期

這些系統開始嘗試藉著擴大功能來解決「資訊孤島的問題」。於是MRPII變成企業資源規劃(Enterprise Resource Planning, ERP)、DRP衍生為供應鏈管理,而現場管理功能則變為整合性的MES。到了1990年代後期,傳統製造系統之間的界線就變得很模糊,如ERP逐漸含有現場管理功能。

以上資料整理自【MESA International White Paper No. 5, 1997】。


Manufacturing execution system mes

MES History


Manufacturing execution system mes

MES Response


Outline6

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

MES core functions


Manufacturing execution system mes

MES assist functions


Manufacturing execution system mes

MES functions

生產產品追蹤

維修保養管理

作業員

管理

原物料(特氣化)需求

資源使用及追縱

產能效率管理

追蹤及控制

規劃及排程

現場生產排單

MES

系統

生產指令及

操作程序

產品規格管理

自動化

資料管理

MES

資料連結

SPC

品質管理

自動化介面及pc連線

工程資料收集


Manufacturing execution system mes

Manufacturing Flow + Process Criteria

Material Flow

Resource (人, 設備, Cassette..)

Production Objects

生產/效率/品管

Fab Off-line

Management

Fab In-line

Operations

Fab Off-line

Analysis

  • WIP 在製品管理

  • 良率統計

  • 機台管理

  • Cycle Time管理

  • 工單管理

  • 材料管理

  • UPF 標準化, 合理化

  • 減少 MO - 機台連線自動化

  • 減少人力 - 傳輸搬運自動化

  • 製造效率控制 (派工)

  • 製程條件控制 (光罩,Recipe)

  • 即時品檢 – IPQC/OQC

  • 提高設備/資產使用率

  • 現場產品狀況

  • 人機效能分析

  • 產能分析

  • 生產效率分析

  • 成本分析

  • QA 管理

  • 良率提昇

How MES help

MES


Manufacturing execution system mes

How MES help

Challenge if Without MES

With MES’s Help

  • Run Cards 記錄所有事件

  • 人工控制所有生產活動

    • 生產流程控制靠Run Card

    • 人工機台操作

    • 人工製程條件控制

    • 生產資料收集困難, 無即時 SPC 管制

    • 品質管制不即時,需人工重新輸入

    • 派工困難

    • 材料管理

  • 無即時現場管理資訊 (在製品,機台,人)

  • 生產效率分析困難

  • 工程資料分析困難

  • 管理報表產生困難

  • 所有資料存入電腦, 方便資料擷取及管理

  • 電腦控制 (或建議) 所有生產活動

    • 簡化操作流程並防止錯誤發生

    • 自動化並防止 Miss Operation

    • Recipe/Mask, Data Feedback/Forward

    • 資料自動收集, 分類, 送給 SPC 管制

    • 電腦即時管制, 並採取 Actions

    • 有效率的派工邏輯

    • 材料比對及管理

  • Real-time Fab-wide 管理

  • Real-time 資料隨時可作分析

  • 節省資料整理時間

  • Information at your fingertip


Manufacturing execution system mes

PART management

BOM, Process management (tool, equipment)

SPEC management (quality spec in each process, queue time)

Technology Management

Tool management

Layout management

Scheduling and Dispatching management

Priority management (Link with SCM)

Capacity Planning

Dispatching agent

Track-In-Out management

Recipe management

Tool ALM management

Equipment management

Process control management

Manufacturing Function Group in semiconductor(1)


Manufacturing execution system mes

Automatic Tool Control

Integrated Material, MES and Tool

Automatic data collection (MFG data and ENG data)

Tool control (track-in, process, track-out)

Real-time tool monitoring

Real-time process monitoring

WIP tracking and decision support system

Detail WIP tracking (WIP-Tool-Human-Time-Event)

Tool Utilization (OEE)

Super Hot Lot Management

Hold Lot management

Alarm management

Data quality control

Queue time management

Rework Management

SPC control

OCAP

Yield analysis

Manufacturing Function Group in semiconductor(2)


Manufacturing execution system mes

Tool Management

Tool ID, Capability

Tool constraint

Tool Layout (link with AMHS)

AMHS management

Human Management

Security

Certification

Time management

Material Management

FOUP

AMHS (MCS management)

GAS/ Chemistry

Integration

SCM integration (scheduling)

PDM integration (PART)

Engineering Data Integration

Manufacturing Function Group in semiconductor (3)


Manufacturing execution system mes

Benefit Type

Description

General Benefits

Improve yield

Reduce cycle time

Production floor management

Improve throughput

Improve equipment utilization

Eliminate/Reduce manual errors

Project-Specific Benefits

Improve customer satisfaction

Improve overall effectiveness

Improve competitiveness

Qualitative Benefits

MES benefit

Source: TIBCO Software


Manufacturing execution system mes

MES benefit

  • The potential gain by implementing MES addresses the need for immediate current, on-line information that allows users of the MES system to make the best informed decisions regarding the application of inventory, plant resources and people:

    • Reduces manufacturing cycle times

    • Reduces WIP Inventory

    • Reduces paperwork between shifts

    • Eliminates lost paperwork/blueprints

    • Improves customer services

    • Reduces or eliminates data entry

    • Reduces lead time

    • Improves product quality

    • Empowers plant operations people

    • Responds to unanticipated events


Outline7

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

MES的架構

關連式資料庫 (Relational Database): MES 的最大特色就是資料庫,因它記錄著整廠的生產資訊,包括:統計品管分析、設備和人力追蹤(Labor Tracking)、物料追蹤(Material Tracking)、實驗室資料(Laboratory Data)、製程資料(Process Data)、工廠文件(PlantDocument)等。這些資訊可提供給各部門做成報表,進行分析,然而製作報表或進行分析的工具往往與MES數不同一系統。欲能提供簡單快速且能跨平台存取功能的資料庫類別,非關連式資料庫莫屬。

圖形使用者介面(Graphical User Interface;GUI): 圖形使用者介面的應用,提供使用者一個容易使用的環境。

開放式系統架構(Open System Architecture):在開放式系統下才能不受電腦廠商 的技術牽絆,而且能使企業內『新』『舊』的電腦技術相容。開放式系統提供了標準的介面、跨平台的應用程式,且資料可跨平台的交換。主從架構(Client/Server Architecture) :這種架構比大型主機架構更節省成本。

系統訂做工具(System Customization Tools): 每一企業對MES功能要求情況各有不 同,MES廠商除了提供標準的功能模組外,還需提供一套良好訂做工具,根據客戶個別需要,快速符合顧客需求。

整合性工具(Integration Tools) :企業內可能存在許多系統;如分散式控制系統 (Distributed Control System)、工廠支援系統(Plant Support System)、MRP II與ERP,MES 必需提供介面來連接這些系統,使資料能夠互通。

Reference From: Joe deSpautz, "Quantifying the benefits of automation", ISA Transaction, No.33, 1994, pp.107-102.

MES 架構


Manufacturing execution system mes

Tool

MES 架構

FACTORYworks

Factory Modeling

EDC/SPC

Report

WIP Management

Process Plan

EDA

EQP Management

Security Control

Monitoring

Message Bus

SEMI DevNT Clients

Area Applications

SECS I/F

Intelligent

User

Interface

IUI +

Web UI

Bus rules

  • Semi-auto EDC

  • Dispatch/What is next

  • Lot Schedule/Based on C/T

  • Reticle Usage forecast

  • Reticle Management

  • Recipe Management

  • Event/Alarm Management

  • Preventive Maintenance

  • Carrier Management

  • EEN/ECN


Manufacturing execution system mes

OHV

FOUP

FOUP

Stocker

MES 架構

MES Server

TCS(Cell Level)

AMHS Integrator

E5/E30/E37

E42/E58

E40/E90

E87/E90

E5/E37

E82

E5/E37

E88

TAP300 + Process Equipment

E84

IntraBay

Xfer Eqp

InterBay

Xfer Eqp

E5 : SECS-II, E30 :GEM

E37 : HSMS Generic Services

E40 : Standard for Processing Management(PJM)

E42 : Recipe Management Standard

E58 : ARMAS

E87 : Carrier Management

E90 : Substrate tracking

E94 : Control Job Management

E82 : IBSEM

E84 : Parallel I/O Interface

E88 : Stocker SEM


Manufacturing execution system mes

MES 架構


Manufacturing execution system mes

TCS servers

TCS servers

TCS servers

TCS servers

(01-125)

MES 架構

MES

EES

HACMP Cluster #2

Cluster

HACMP Cluster #1

FIRSTDB

Ext I/F

RTMDB

SM/SCH

Server

Database

Server

(MMDB/SPCDB)

MM

Server

Shared

Storage

Shared

Storage

EMR

LES/eSPC

EES ODS

CIMDB

(Hot-Standby)

CIMDB

RPTDB &

Replication

CIM Framework

CIM Framework

CIM Framework

Orbix

Orbix

Orbix

AIX / HACMP

HP 8400

HP 8400

AIX / HACMP

AIX / HACMP

HP 8400

AIX / HACMP

AMHS MCS

Standby

AMHS MCS

Server

Dispatching

Server

(RTD)

i-EDA

Server

Dispatching

Server

(ISS report)

Reporting

DB Server

Orbix

Orbix

AIX / HACMP

AIX / HACMP

Sun

AIX

AIX

Sun

DBS

servers

DBS

servers

DBS

servers

GMP

Loader

ECS

server

RTM

server

RMS

server

PMS

server

ALM

server

MMS

server

OSS server

ADODB

server

CFM loader

(f14sch01)

CFM server

(f14cfm01)

MDB server

SDEV F/W

COMet

Orbix

NT or Win2000/PC

OMI

SCH Client

SM Client

ECS

GUI

RTM

GUI

APC300

GUI

ALM

GUI

PMS

GUI

RMS

GUI

MMS

GUI

CFM300

Report

Viewer

SPC Pro

OSS

GUI

iEDA

Orbix COMet

SDEV F/W

Orbix

SiView MainStarter

NT or Win2000/PC


Outline8

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES operation

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

EQPsrv

WIPsrv

PRPsrv

CATsrv

OPRsrv

MDLsrv

EDCsrv

Lot 1234

Lot 4567

Lot 5678

Lot 34324

Lot 84567

Lot 54877

Intelligent Client

SpcClient/RuleSrv

MES framework

Exposure

Develop

Coat

Dispatch

Display WI

SetUpEqp

TrackIn

TrackOut

SetUpEqp

TrackIn

Collectdata

TrackOut

TrackIn

CollectData

TrackOut

MonitorAlarms

(MBX)

Eqp Manager

Equipment Communications

…………………………………..


Manufacturing execution system mes

Process End

Lot01

Lot01

Lot03

Lot03

Lot02

Lot02

How does MES function with operation

Track In

Lot List:Lot01 Lot02 Lot03

Input Lot Id, EQ Id

Display Operations

Temp: 75 C

Time: 120 min

*Data Collection

Data Collection

Input Data

Track Out Info.

Next Step

Next Location

Track Out

Input Lot Id, Qty

Process Start

Lot01

Lot Load into EQ& Setup Parameter

Lot Unloadfrom EQ

Setup EQ

Transfer Lot to Next Location


Manufacturing execution system mes

Process End

Lot01

Lot01

Lot03

Lot03

Lot02

Lot02

How does MES function with operation

Track In

Lot List:Lot01 Lot02 Lot03

Input Lot Id, EQ Id

Display Operations

Temp: 75 C

Time: 120 min

*Data Collection

Data Collection

Input Data

Track Out Info.

Next Step

Next Location

Track Out

Input Lot Id, Qty

Process Start

Lot01

Lot Load into EQ& Setup Parameter

Lot Unloadfrom EQ

Setup EQ

Transfer Lot to Next Location


Manufacturing execution system mes

Arrival Time

S

T

E

P

C

Y

C

L

E

T

I

M

E

Process Start Time

RUN

State

Yield%

Process

End Time

WAIT

State.

How does MES function with operation

Staged Lots

In-Line

Staging

Area

WAIT

State

P

R

O

C

E

S

S

-

S

T

E

P

#1

Equipment

EQP1

EQP2

Track-In

Track-Out

EQP3

EQP4

Scrap

EQP5

#2

Next Process Step Staging Area


Manufacturing execution system mes

SiView DEMO - BR


Manufacturing execution system mes

SiView DEMO – Tool status


Manufacturing execution system mes

SiView DEMO – WIP tracking


Manufacturing execution system mes

SiView DEMO – WIP tracking


Manufacturing execution system mes

SiView DEMO – SPC


Manufacturing execution system mes

SiView DEMO – Decision Support


Outline9

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES operation

MES 技術

MES 與其它e 化系統的整合

Outline


Manufacturing execution system mes

Message Bus (TIBCO, XML, SOAP, Rosetanet)

Database (Oracle, SQL, DB2, Informix)

Client/Server architecture (Client -> MM server)

GUI development library

Tool control development

SEMI SECS/GEM/XML standards

Decision support system (smart dispatching system)

MES 技術


Outline10

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES operation

MES 技術

MES 與其它e 化系統的整合

MES 未來發展方向

Outline


Manufacturing execution system mes

MES and E-commerce

TSMC Online

Services & Technologies

Production Information

an overview of services and

technologies

an array of up-to-date logistic

status reports

Design Portal

Technical Documents

an integrated environment for

IC design assistance

a virtual document center for

providing one click download

Business Transactions

Quality & Reliability

book product names, submit

service requests, and access

CyberShuttleTM services

policy and reviews on the

process quality and reliability

information

Assembly & Test

Customer Satisfaction

information on sort, assembly

and final test services.

status tracking for customer

corrective action request


Manufacturing execution system mes

Customers

ESCM Customer Interfacing (real-time)

ESCM Planning (batch run)

Judged

Demand

Forecast

Demand

Planning

Allocation

Planning

Capacity

Plan

Support

plan

Support

Commitment

Demand-to-Support

CASD

Capacity

Modeling

Allocation

Manage

-ment

Adjusted

CASD

Capacity

Plan

ATP Request/

Consumption

(NSD)

PO entry

and change

Consumed

ATP

Order

Management

ATP

Output

Planning

Manufactur

ing

Planning

MPS

Order-to-Confirm

Delivery

Confirmation

ATP

ATP Plan

Actual Delivery

Order-to-Ship

MES and ERP

Demand

Forecast

Purchase

Order


Manufacturing execution system mes

Customer

Customer Engineer

ENG1 / RD

Product Engineer

EBO

Maintain

Technology Infor.

Book TM number

EBO system

MT Form

(Mask Tooling)

Issue MT/TIP

Maintain

holadable stage

FSR Form

(Foundry Service

Request)

Issue

Engineering Notice

PE Infor.

maintenance

MES system

Customer lot

handling

request

Issue lot

handling request

: PDM system

: other system

MES and PDM


Outline11

產業Operation

產業e化架構

Manufacturing Sequence Flow

Why MES (factory operation point of view)

Why MES (Industry point of view)

MES 定義

MES 功能

MES 架構

MES operation

MES 技術

MES 與其它e 化系統的整合

MES 未來發展方向

Outline


Manufacturing execution system mes

Scalability (support considerable transaction for bigger FABs and detail information)

System centric operation instead of human-centric operation (knowledge operation)

Simulation Capability is embedded for knowledge creation

Industry information sharing instead local information sharing (Virtual FAB support)

Friendly decision support system

Exception handling become only thing for human operation

Future Direction of MES


Manufacturing execution system mes

Future Direction of MES

knowledge base

man-machine

communication

operator

processdata base

history

logging

simulation

instructor

actualization

maintenanceengineer

process data

plant


Manufacturing execution system mes

Future Direction of MES


Manufacturing execution system mes

Q & A


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