Transfer calibration
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Transfer Calibration. LRT Training Center Shaw Wang. Theory of Operation. All wafer locations throughout the system are defined as stations. Each robot must be calibrated (“taught”) to each station. Stations are typically defined by the wafer center at each location.

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Transfer Calibration

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Transfer calibration

Transfer Calibration

LRT Training Center

Shaw Wang


Theory of operation

Theory of Operation

  • All wafer locations throughout the system are defined as stations.

  • Each robot must be calibrated (“taught”) to each station.

  • Stations are typically defined by the wafer center at each location.

  • The wafer center position is defined by a radial (R) and theta (T) coordinate relative to the robot being taught. The vertical position (Z or BTO) is defined relative to the robot being taught. Which is typically defined as the wafer height that the wafer can freely enter and exit the station.

  • Stations with multiple slots must define the number of slots (slot) and the pitch (p) between the slots.

  • For stations not radially located from the robot center, the wafer path to and from the station must also be defined (via points).

  • For stations which require mapping, map positions must also be defined. These positions are typically defined with radial, theta and wrist coordinates.

  • Reference

    • “Transfer Calibration procedure”, 202-012898-001 Rev G


Transfer calibration fixtures

CDM (Control display module)

Dummy wafer (Carbon wafer)

Chamber fixture

ATM arm position

Airlock fixture

Dynamic Alignment

FOUP fixture

ATM Aligner fixture

Refer document:202-012898-001 version G

Transfer Calibration Fixtures


Transfer calibration fixtures1

Transfer Calibration Fixtures


System block diagram

ATM

Robot

Drive

ATM Robot Controller

Motor Power

Terminal Server

RS-232 Serial Cable

Signal Cable

(SIO 1)

Null Modem Cable

(SIO 2)

RS-232 Serial Cable

Aligner

VTM Robot

24VDC Power

24VDC Power

VTM Mother Board

Misc IO

Misc IO

System Block Diagram

ATM ROBOT COVER SWITCHES

LPM 1, LPM 2, LPM 3

Aligner Window

A/L1 Window, A/L2 Window

Right Side Window (Bottom)

Right Side Window (Top) Newer Systems


Atm robot cover switches

ATM Robot Cover Switches

A/L 2 Window

Right side Window

A/L 1 Window

Alinger Window

Loadport Switch 1 ,2 & 3


Station numbering

ATM 2

Middle FOUP

ATM 3

Right FOUP

ATM 1

Left FOUP

ATM 7

Aligner

ATM 4

IMM

ATM 10

ATM 8

ATM 9

ATM / VTM 6

Left Airlock (1)

ATM / VTM 5

Right Airlock (2)

VTM 4

PM 4

VTM 1

PM 1

VTM 3

PM 3

VTM 2

PM 2

Station Numbering


Wafer flow

Wafer Flow

  • Serial Processing

    • Poly, Exelan


Wafer flow1

Wafer Flow

  • Parallel Processing

    • Metal/Strip, Poly/Strip


Atm calibration

ATM Calibration

  • Module station positions (R, T, Z) are taught by the user using the CDM and a fixture that is placed in the module.

  • Intermediate points are defined by calculations based on the nominal positions.

    • Intermediate points include via positions, map positions, & map via positions.

    • Nominal points are based off of a defined home position.

  • Constants are defined where possible and set based on nominal positions or values.


Vtm calibration

VTM Calibration

  • Module station positions (R, T, Z) are taught by the user using the CDM and a fixture that is placed in the module.

  • Constants are defined were possible and set based on nominal positions or values.

  • Each VTM position is optimized using Dynamic Alignment (can be done at atmosphere or vacuum)

    • A wafer is perfectly centered in the station

      • Wafer is centered either by a fixture (PM) or by the aligner (LL)

    • Routine is run through system software to adjust the station

      • The wafer is picked

      • Dynamic Alignment reports a radial and theta offset (wafer center offset).

      • Station position (R and T) is adjusted so that the arm and the wafer line up.


Prepare the system

Prepare the System

  • 2300 software ready.

  • ATM /VTM Robots had installed.

  • System must be leveled.

  • Robots and aligner had been setup.

  • Pin lifter calibrated.


Leveling procedure

Leveling Procedure

  • ATM Robot Leveling.

  • Aligner Leveling.

  • Airlock Buffer/Cool Station Leveling.

  • 25 slots Buffer station Leveling.

  • LPM Installation and Leveling.

  • KLA Metrology Station Leveling.

  • VTM Robot End Effector Leveling for SCARA Arm.

  • ATM Robot vacuum switch set up.


Atm vtm robots calibration

ATM/VTM Robots Calibration

  • ATM-LPM.

  • ATM-KLA Metrology Station.

  • ATM-Airlocks.

  • ATM-Aligner.

  • ATM-Buffer/Cool station.

  • VTM-Airlocks.

  • VTM-PMs.

  • After finished all the station, do the ironman test.

    • To identify the reliability of transfer.


Diagnose iron man

Diagnose\Iron Man


Calibration parameters

Calibration Parameters


Backup wps system

Backup – WPS System


Wps system

WPS System

  • Dynamic Alignment is a wafer location and centering algorithm used during wafer transfer in the VTM. Dynamic Alignment uses two sensors on each facet to determine the location of the wafer.

  • 200mm use sensor 2 for wafer presence.

  • 300mm use sensor 1 for wafer presence.

300mm Wafer

200mm Wafer


Wps system1

WPS controlPCB

Sensor optical 7

Sensor optical 1

P2

P1

Sensor optical 8

Sensor optical 2

P4

P3

Sensor optical 9

Sensor optical 3

P6

P5

Sensor optical 10

Sensor optical 4

P8

P7

Sensor optical 11

Sensor optical 5

P10

P9

Sensor optical 12

Sensor optical 6

P12

P11

VTM Mother PCB

WPS System

  • 200 mm System

Connect to Emitter

Connect to Detector

AL1 S2T

AL1 S1T

AL1 S1R

AL1 S2R

AL2 S1T

AL2 S2T

AL2 S1R

AL2 S2R

PM1 S1T

PM1 S2T

PM1 S1R

PM1 S2R

PM2 S2T

PM2 S1T

PM2 S2R

PM2 S1R

PM3 S1T

PM3 S2T

PM3 S2R

PM3 S1R

PM4 S1T

PM4 S2T

PM4 S2R

PM4 S1R


Wps system2

WPS System

  • 300mm System

Connect to Emitter

Connect to Detector

AL1 S1T

Sensor optical 7

WPS controlPCB

Sensor optical 1

AL1 S3T

P2

P1

AL1 S1T

AL1 S3R

AL2 S1T

AL2 S3T

Sensor optical 8

Sensor optical 2

P4

P3

AL2 S1R

AL2 S3R

PM1 S1T

PM1 S3T

Sensor optical 9

Sensor optical 3

P6

P5

PM1 S3R

PM1 S1R

PM2 S3T

Sensor optical 10

Sensor optical 4

PM2 S1T

P8

P7

PM2 S3R

PM2 S1R

PM3 S3T

PM3 S1T

Sensor optical 11

Sensor optical 5

P10

P9

PM3 S3R

PM3 S1R

PM4 S3T

PM4 S1T

Sensor optical 12

Sensor optical 6

P12

P11

PM4 S3R

PM4 S1R

VTM Mother PCB


Wps system3

WPS System

  • Location


Component

Component

  • Transducers

    • 24 VDC to provide light source for fiberoptics

    • Convert light energy into 5 VDC signal

    • LEDs

      • Green - DC Power ON

      • Amber - OFF when Blocked

    • Gain Adjustment - Factory Set

LEDs

Transducers

Center Finding PCB

Gain Adjustment


Component1

Component

  • Detector

    • Receive light if not blocked by wafer

  • Emitter

    • Send light

Emitter

Detector


Da function

DA function

  • Theory of Operation


Da function1

DA function

  • Theory of Operation


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