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Vincenzo Guidi Dipartimento di Fisica Università di Ferrara

Dipartimento di Fisica Università di Ferrara - Italy. INFM - INFN. The sensors and semiconductors laboratory. Vincenzo Guidi Dipartimento di Fisica Università di Ferrara. Activities at the Sensors and semiconductors group. Fundamental and applied research on nanostructured materials

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Vincenzo Guidi Dipartimento di Fisica Università di Ferrara

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  1. Dipartimento di Fisica Università di Ferrara - Italy INFM - INFN The sensors and semiconductors laboratory Vincenzo Guidi Dipartimento di FisicaUniversità di Ferrara

  2. Activities at the Sensors and semiconductors group • Fundamental and applied research on nanostructured materials • Micromachining of microdevices • Production and characterization of gas sensors and photovoltaic cells

  3. Overview Prof. Giuliano Martinelli Andrea Antonini Federico Bizzi Luca Bonazzi Mariangela Butturi Moira Buzzolani Maria Cristina Carotta Barbara Cavicchi Andrea Chiapatti Luigi Crema Matteo Ferroni Alessio Giberti Dario Gnani Vincenzo Guidi Cesare Malagù Federico Montoncello Marco Piga Alessandro Ronzoni Marco Stefancich Donato Vincenzi

  4. Chemoresistive gas sensors printing of the paste paste preparation the sensor 1 mm thick film Powder preparation substrate gold electrodes temperature feed-back resistor Thick film process 0 platinum heater 250 500 nm

  5. CO = 100 ppm wet air 2.2 T = 400 oC Ggas/Gair 1.4 1  m 1  m 1  m 1  m 1.0 0 20 40 60 time (min) TiO2 gas sensing films 650 oC 850 oC 1.8 Doping with tantalum (10 at.% ) 850 oC 650 oC

  6. Comparison between conventional and innovative microsensors in CO detection Microsensor Conv. instrum. CO concentration (ppm) 1:00 8:00 18:00 0:00 8:00 18:00 0:00 Time (h)

  7. 3 2 1 Air quality assessment in urban environment…… Monitoring experiments in the frame of a project for evaluating the degradation level of the historical buildings in Ferrara Palazzo dei Diamanti 4

  8. Microsensors deposited on a micro hotplate SiO2+Si3N4 SiO2+Si3N4 Polysilicon resistor Insulating film Low power consumption because of low thermal conductivity: 30 mW @ 400 ºC Anisotropic etching

  9. Gas microsensors with hybrid technology

  10. 0,5 mm Traditional gas-chromatografic with a capillary in fused silica 30 cm Miniaturized gas-cromatografic facility made of micromachined silicon

  11. P N ox N+ P+ High-concentration photovoltaic solar cells Mirrors are used to concentrate the radiation of the Sun on high-efficiency PV cells. PV cells are fabricated through microlithography 100 m

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