NPG3. NPG4. NPG1. NPG2. Scanned particles and areas. Scanned particles are labeled. Scanned areas are marked by red boxes. P13 and P14 were scanned to get closer to NPG1, so that a relatively precise position can be calculated. Scan on P13 4x4 um. P 14. P 13. Scan on P13 & P14 4x4 um.
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Scanned particles and areas
Scan on P13
Scan on P13 & P14
40xOptical – PostIndent
P 16SEM 5/29/2009
It is interesting that the loads on grid with particles are lower than the loads on blank grid. This is different from what we saw last time.
Expected indentation location
1st scan, can not judge position.