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MICRO-COOLING CONNECTORS

MICRO-COOLING CONNECTORS. STANDARD PEEK CONNECTORS - IDEX - NanoPorts Gluing to silicon surface: with glue ring standard from IDEX with Araldite 2020 or Araldite 2012. Leak tightness made from a plastic o-ring. Gluing problems ! . Gluing to hold high CO2 pressure.

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MICRO-COOLING CONNECTORS

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  1. MICRO-COOLING CONNECTORS I° microEO meeting

  2. STANDARD PEEK CONNECTORS - IDEX - NanoPorts • Gluing to silicon surface: • with glue ring standard from IDEX • withAraldite 2020 or Araldite 2012 Leaktightness made from a plastic o-ring I° microEO meeting

  3. Gluingproblems! Gluing to hold high CO2 pressure In vacuum vessel at night: I° microEO meeting

  4. RAPHAEL DESIGN CONNECTOR – for CO2 high pressure - Usedwithsnake 1 prototype (2.5mm thickness) - Copied for the ATLAS micro-channel design  used for pressure tests with Si-Pyrex I° microEO meeting

  5. Stainlesssteel tube • SOLDERING CONNECTORS – Ferrules • - Based on the paper: ‘Solder-based chip-to-tube and chip-to-chip packaging for microfluidic devices Edward R. Murphy et al., The Royal Society of Chemistry, 2007’ • - First trials withSwagelokferrules Stainlesssteelferrule Solder Brassferrule 1/16’’ tube Stainlesssteelferrule Brassferrule Silicon plate Tested up to 250 bar!!! I° microEO meeting

  6. Kovar Cu Plating SnPb 0.1 mm Foil Au 100nm Ni 350nm Ti 200nm Silicon A.Mapelli • SOLDERING CONNECTORS – KOVAR inserts • KOVAR: FeNiCoalloy with a CTE coefficient comparable with the CTE of silicon (~ 3 10-6/K) in order to avoid mechanical stresses due to temperature gradients • Kovar inserts and stainlesssteel tubes Cu plated • Soldering in vacuum oven at 200°C Stainless steel tube (Ø1.6mm) Tested up to 700 bar!!! I° microEO meeting

  7. - ‘Lamage’ in KOVAR to perform the solderingwith the tube • - X-ray picture of the interface: smallvoids! Small voids Kovar-Si interface Solder Silicon I° microEO meeting

  8. Solderedsamplesembedded in resin and polished pictures of the hole Masksused to pattern the siliconmetalization! Optimizedconnector for material budget reduction I° microEO meeting

  9. KOVAR connectors for the new LHCbSnake prototype I° microEO meeting

  10. LATEST IDEA (fromyesterday!) – NA62 project - Small Kovar insert with a throughhole and bending of the tube! Stainless steel tube (Ø1.6mm) Kovar Cu Plating SnPb 0.1 mm Foil Au 100nm Ni 350nm Ti 200nm Silicon A.Mapelli I° microEO meeting

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